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Engineers chart semiconductors on the scale of atoms

Madison, Wis. -- Spanning fewer than a thousand atoms, the electronic devices on semiconductor chips have become so miniscule they defy most efforts to characterize them. Now for the first time, engineers have demonstrated a way to image th0se vanishingly small devices by mapping them atom-by-atom.

In a study published in the Aug. 1 issue of Applied Physics Letters, John Boo......

Full article >>> who is now senior applications engineer at Imago.

LEAP is an advanced atom probe microscope invented by Kelly. A former UW-Madison professor of materials science and engineering, he left the university to start Imago with Larson, then a graduate student. To create images, Kelly's instrument applies voltage to a specially prepared, needle-shaped sample, ripping atoms from the sample's tip......

Full article >>> 40 nanometers, even 10 nanometers of inter-diffusion represents a 25 to 30 percent error."

Booske and Thompson devised a microwave rapid-heating technique that they believed would limit diffusion. But the pair soon realized the system's minute scale left them no way to confirm the boron atoms were staying put.

"After searching around, we came to the conclusion that the only techn......

Full article >>> er@cae.wisc.edu">mmfisher@cae.wisc.edu. "At Work for Wisconsin" is a regular feature taking a look at science and technology advances from a UW-Madison perspective.
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Full article >>>
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Source:wistechnology.com By Madeline Fisher 08/01/05


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