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University of Helsinki and ASM International renew research agreement on atomic layer deposition
Date:1/21/2009

oncentrate more on developing the working processes and transferring these to ASM's business units.

- In the current situation of fragmented research funding, this agreement is exceptional both in terms of length and volume, comment academy professor Markku Leskel and professor Mikko Ritala, who head the ALD research group at the Laboratory of Inorganic Chemistry at the University. - We and our students also greatly appreciate this kind of collaboration with industry which takes us to the area where basic and applied research becomes mixed. The questions we are dealing with in our research are fundamental by their nature, yet their solutions may find rapid use in the future semiconductor devices.


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Contact: Prof. Mikko Ritala
mikko.ritala@helsinki.fi
358-091-915-0193
University of Helsinki
Source:Eurekalert

Page: 1 2

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