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Super-resolution X-ray microscopy
Date:7/17/2008

hibault, first author on the publication. "In order to achieve images of the highest precision, the algorithm not only reconstructs the sample but also the exact shape of the light probe resulting from the x-ray beam."

Conventional electron scanning microscopes can provide high-resolution images, but usually only for the surface of the specimen, and the samples must be kept in vacuum. The Swiss team's new super-resolution microscope bypasses these requirements, meaning that scientists will now be able to look deeply into semiconductors or biological samples without altering them. It can be used to non-destructively characterize nanometer defects in buried semiconductor devices and to help improve the production and performance of future semiconductor devices with sub-hundred-nanometer features. A further very promising application of the technique is in high-resolution life science microscopy, where the penetration power of X-rays can be used to investigate embedded cells or sub-cellular structures. Finally, the approach can also be transferred to electron or visible laser light, and help in the design of new and better light and electron microscopes.


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Contact: Franz Pfeiffer
franz.pfeiffer@epfl.ch
41-763-201-045
Ecole Polytechnique Fdrale de Lausanne
Source:Eurekalert

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