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SPIE Announces 2013 Award Winners
Date:4/22/2013

for lifetime achievement.

Chandra S. Vikram Award in Optical Metrology
Malgorzata Kujawinska, Warsaw University of Technology, Warsaw, Poland, is the 2013 recipient of the Chandra S. Vikram award in recognition of her lifetime of achievements in full-field optical metrology and optical testing: her pioneering contribution to fields such as automatic fringe pattern analysis, integrated interferometric sensors, optical and digital holography, optical tomography, structured light and moiré fringe methods as applied to fields such as experimental mechanics, multimedia, material engineering, civil engineering and art objects measurement and monitoring.

The Chandra S. Vikram Award in Optical Metrology is given annually for exceptional contribution to the field of optical metrology. The award may be presented for a specific achievement, development, or invention of significant importance to optical metrology, or may be given for lifetime achievement.

Frits Zernike Award in Microlithography
David Markle, Periodic Structures Inc., Los Gatos, CA, USA, is the 2013 recipient of the Frits Zernike Award for Microlithography in recognition of his pivotal role in the development of numerous lithography tools, including the Perkin-Elmer Micralign and Micrascan tools, and the Ultratech Stepper. His insights and engineering talents have helped to guide both mechanical and optical designs of lithography tools for the last 40 years.

The Frits Zernike Award is given for outstanding accomplishments in microlithographic technology, especially those furthering the development of semiconductor lithographic imaging solutions.

SPIE Early Career Achievement Award
Timothy J. White, US Air Force Research Laboratory, Wright-Patterson Air Force Base, OH, USA, is the 2013 recipient of the Early Career Achievement Award in recognition of his innovative work in the development of light responsive materials and their employment as sm
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