Navigation Links
SPIE Advanced Lithography will Bring Industry Focus to Next-generation Tools and Systems
Date:2/18/2013

Bellingham, Washington (PRWEB) February 18, 2013

Lithography scientists, engineers, and developers -- long accustomed to working years ahead in order to meet industry needs -- face keen challenges, with meeting user expectations, enabling new capabilities, and controlling costs at the top of the list. SPIE Advanced Lithography, the premier annual forum for discussions on meeting the challenges in developing state-of-the-art lithographic tools, resists, metrology, materials characterization, and design and process integration, will bring the community together in San Jose, California, to address those issues.

The event will run 24-28 February at the San Jose Convention Center and San Jose Marriott Hotel.

Symposium chair Harry Levinson (GLOBALFOUNDRIES) said organizers anticipate interest in several topics in particular, including:

  • Designing with multi-patterning and directed self-assembly (DSA): beyond SEMs toward real chips
  • Line edge roughness: clearly a concern of many and the focus of a session in the conference on Advanced Etch Technology for Nanopatterning.
  • Resist limits: secondary electrons, tradeoffs among resolution, line-edge roughness and exposure speed.

However, Levinson noted, “To be honest, the real buzz usually comes from something unexpected, which is probably one of the best reasons for attending Advanced Lithography!”

With the presence of leaders from companies such as Intel, Samsung, ASML, Taiwan Semiconductor Manufacturing Corp., and other companies that have announced large investment strategies in new technology, “unexpected” topics might include R&D toward photonics integrated circuits versus silicon photonics, retooling for 450mm wafers, or power-source issues in EUV (extreme ultraviolet) tools.

In addition to featured speakers and more than 560 technical talks, the event will include panel discussions on disruptive and emerging technologies, full- and half-day short courses on lithography topics, interactive poster paper receptions, and a 60-company exhibition showcasing many of the industry's top semiconductor suppliers, integrators, and manufacturers. The exhibition will run Tuesday and Wednesday, 27 and 28 February.

Plenary presentations from leaders in the lithography industry include:

  • Bill Siegle, Independent Consultant and ASML Advisory Board Member: “Contact printing to EUV: lessons learned from the art of lithography”
  • Howard Ko, Senior VP and General Manager, Synopsys Silicon Engineering Group: “The evolution of EDA alongside rapid silicon technology innovation”
  • Charles Szmanda, The Patent Practice of Szmanda & Shelnut, LLC: “The new U.S. patent law: what you need to know and how it will affect your strategy.”

Technical talks are organized into seven conferences:

  • Alternative Lithographic Technologies
  • Extreme Ultraviolet Lithography
  • Metrology, Inspection, and Process Control for Microlithography
  • Advances in Resist Materials and Processing Technology
  • Optical Microlithography
  • Design for Manufacturability through Design-Process Integration
  • Advanced Etch Technology for Nanopatterning

Accepted papers will be published in the SPIE Digital Library as soon as approved after the meeting, and in print volumes and digital collections.

About SPIE
SPIE is the international society for optics and photonics, a not-for-profit organization founded in 1955 to advance light-based technologies. The Society serves nearly 225,000 constituents from approximately 150 countries, offering conferences, continuing education, books, journals, and a digital library in support of interdisciplinary information exchange, professional growth, and patent precedent. SPIE provided over $3.2 million in support of education and outreach programs in 2012.

Read the full story at http://www.prweb.com/releases/2013/2/prweb10443869.htm.


'/>"/>
Source: PRWeb
Copyright©2012 Vocus, Inc.
All rights reserved

Related biology technology :

1. Rigaku publishes new WDXRF Application: Determination of Metals in Copper Concentrate by Advanced Correction Method for Fused Beads
2. Advanced Cell Diagnostics Appoints Evangeline Gonzalez as Chief Commercial Officer
3. New Advanced High End Brix Refractometer
4. INRS acquires a groundbreaking advanced imaging infrastructure
5. GIN Introduces Advanced Robotics and Dispensing Technnology at SLAS 2013 in Orlando, FL
6. Nanonex Delivered Advanced Nanoimprint Tool NX-B200 to Swinburne University of Technology, Australia
7. University of Pennsylvania Purchases Nanonex Advanced Nanoimprint Tool NX-2600 BA
8. Advanced Polymer Trading to Exhibit at ArabPlast 2013 in Dubai
9. Dallas-Fort Worth Fertility Associates Celebrates First Birth in North Texas from Advanced Trophectoderm Biopsy Screening Technology
10. Advanced manufacturing venture highlights regions economic prospects
11. Advanced Cell Diagnostics Completes $12 Million Series B Financing
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:3/23/2017)... Research and Markets has announced the addition of the ... ... The Global Market for Bioproducts Should Reach $714.6 Billion by ... 8.9%, This research report quantifies the two ... segments: bio-derived chemicals, biofuels, pharmaceuticals (biodrugs and herbal/botanicals), biocomposite materials, ...
(Date:3/23/2017)... 23, 2017  BioPharmX Corporation (NYSE MKT: BPMX), ... dermatology market, today reported financial results for the ... will provide an update on the company,s clinical ... "We are pleased to report that last ... said President Anja Krammer. "We achieved key clinical ...
(Date:3/23/2017)... New York , March 23, 2017 ... blood plasma products and derivatives market is fragmented due to the presence ... players, such as Proliant, Thermo Fisher , and Sigma-Aldrich, compete ... leader, these three companies, collectively, held more than 76% of this ... ...
(Date:3/22/2017)... 22, 2017 Regeneron Pharmaceuticals, Inc. (NASDAQ: REGN), today ... (RGC), U.K. Biobank and GSK to generate genetic sequence data ... The initiative will enable researchers to gain valuable insights to ... wide range of serious and life threatening diseases. ... Genetic evidence ...
Breaking Biology Technology:
(Date:2/22/2017)... -- With the biometrics market to exceed $10 ... that innovative and agile startups must incorporate into ... changing competitive landscape: multifactor authentication (MFA), point-of-sale (PoS), ... "Companies can no longer afford to cut corners ... Pavlakis , Industry Analyst at ABI Research. "Pairing ...
(Date:2/21/2017)... -- Der weltweite Biobanking-Sektor wird bis zum ... mit mehr als 50 Vertretern aus verschiedenen Branchen wurde aber ... diese Prognose zu realisieren. ... Zu den Schwierigkeiten für ... für die Biobank, die Implementierung Zeit sparender Technologien, ein ...
(Date:2/14/2017)... -- Wake Forest Baptist Medical Center today announced Julie Ann Freischlag, ... (CEO). Freischlag joins the medical center on May 1 ... who last year announced that he would transition to ... it since 2008.   As CEO, Freischlag ... academic health system, which includes Wake Forest School of ...
Breaking Biology News(10 mins):