Applications for the EpiVapor system include:
-- Precursor vapor delivery for production environment MOCVD/ALD
deposition systems employed to fabricate semiconductor devices
-- TMG delivery for MOVPE HBTs and HBLEDs
-- DEZ and TMG delivery for MOCVD Solar Cells
-- TMA delivery for ALD high-k Al2O3 for logic, memory, and MEMS devices
-- Other high volatility III-V and silicon semiconductor precursors
The EpiVapor system is available now. For more information, please visit http://www.safchitech.com.
About SAFC Hitech: SAFC Hitech provides a unique chemistry service translating application understanding into performance materials worldwide. Through collaborative partnerships and an integrated approach from research and development, process development and scale up to commercial manufacturing, SAFC Hitech invests in innovation and manufacturing enabling current and future technology needs. Further information can be found at http://www.safchitech.com.
About SAFC: SAFC(R) is the custom manufacturing and services group
within Sigma-Aldrich that focuses on high-purity inorganics for high
technology applications, cell culture products and services for
biopharmaceutical manufacturing, biochemical production and the
manufacturing of complex, multi-step organic synthesis of APIs and key
intermediates. SAFC has manufacturing facilities around the world dedicated
to providing manufacturing services for companies requiring a reliable
partner to produce their custom manufactured materials. SAFC has four focus
areas -- SAFC Pharma(TM), SAFC Supply Solutions(R), SAFC Biosciences(TM),
and SAFC Hitech(TM) -- and had annual sales of nearly $600 million in 2007.
SAFC is one of the world's 10 largest fine chemical businesses. For more
information about SAFC, visit
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