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SAFC Hitech Launches Metalorganic Bulk Vapor Distribution System for Compound Semiconductor Manufacturing
Date:6/1/2008

l unit (TCU).

Applications for the EpiVapor system include:

-- Precursor vapor delivery for production environment MOCVD/ALD

deposition systems employed to fabricate semiconductor devices

-- TMG delivery for MOVPE HBTs and HBLEDs

-- DEZ and TMG delivery for MOCVD Solar Cells

-- TMA delivery for ALD high-k Al2O3 for logic, memory, and MEMS devices

-- Other high volatility III-V and silicon semiconductor precursors

The EpiVapor system is available now. For more information, please visit http://www.safchitech.com.

About SAFC Hitech: SAFC Hitech provides a unique chemistry service translating application understanding into performance materials worldwide. Through collaborative partnerships and an integrated approach from research and development, process development and scale up to commercial manufacturing, SAFC Hitech invests in innovation and manufacturing enabling current and future technology needs. Further information can be found at http://www.safchitech.com.

About SAFC: SAFC(R) is the custom manufacturing and services group within Sigma-Aldrich that focuses on high-purity inorganics for high technology applications, cell culture products and services for biopharmaceutical manufacturing, biochemical production and the manufacturing of complex, multi-step organic synthesis of APIs and key intermediates. SAFC has manufacturing facilities around the world dedicated to providing manufacturing services for companies requiring a reliable partner to produce their custom manufactured materials. SAFC has four focus areas -- SAFC Pharma(TM), SAFC Supply Solutions(R), SAFC Biosciences(TM), and SAFC Hitech(TM) -- and had annual sales of nearly $600 million in 2007. SAFC is one of the world's 10 largest fine chemical businesses. For more information about SAFC, visit

SOURCE Sigma-Aldrich
Copyright©2008 PR Newswire.
All rights reserved

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