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SAFC Hitech Launches Metalorganic Bulk Vapor Distribution System for Compound Semiconductor Manufacturing
Date:6/1/2008

chemicals to the tool plays a significant part in reducing overall COO. In addition, the reliable, flexible and highly controllable dosimetry of organometallic precursors is of paramount importance in production environments where downtime is prohibitively expensive. The success we have seen with our EpiFill technology for pyrophoric materials motivated us to develop a vapor distribution system. With the introduction of the EpiVapor system we are reducing both system down time and the amount of hardware used per tool, eliminating the need of multiple Temperature Controller Units and enabling automation and bulk chemical change out in an arrangement that can be tailored for the specific requirements of the customer."

The EpiVapor system is comprised of an electronic and chemical element. The electronic component features a user-friendly LCD touch screen display that shows the process flow diagram and user interface. The touch screen displays an array of information including bulk tank liquid levels, valve configurations, fluid and vapor flow paths and system pressure/vacuum, that make the operation of the unit in both automatic (auto) and manual (service) modes very simple, as well as an alarm screen, recipe screens, programmable set points and multilevel password protection for added security.

The chemical section of the EpiVapor system consists of a cabinet which is enhanced for the use of pyrophoric materials with smoke detectors, audible and visual alarms, a watchdog system for automatic operation, optional UV/IR flame detector, 110% containment spill tray, and manifold with fail safe pneumatic valves. The EpiVapor system is both S2-93/98 and S2-0200 certified and is CE marked, meeting all of the relevant European directives.

The other components built into the system are a pressure transducer, pressure controller, a Venturi vacuum generator, a vaporizer bubbler fitted with continuous and fixed level sensors and a TCR2000R temperature contro
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SOURCE Sigma-Aldrich
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