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SAFC Hitech Launches Metalorganic Bulk Vapor Distribution System for Compound Semiconductor Manufacturing
Date:6/1/2008

EpiVapor Extends proven EpiFill Technology to Optimize Efficiency and

Safety and Reduce Cost of Ownership

ST. LOUIS, June 2 /PRNewswire-FirstCall/ -- SAFC Hitech(TM), a focus area within SAFC(R), a member of the Sigma-Aldrich Group (Nasdaq: SIAL), today announced the introduction of EpiVapor(TM), a metalorganic vapor phase distribution system for compound semiconductor manufacturing. EpiVapor eliminates the need for localized tool bubblers and TCU's by delivering vapors from highly volatile and sensitive pyrophoric liquids directly to MOCVD systems, allowing manufacturers to realize considerable cost savings.

An extension of SAFC Hitech's industry-proven EpiFill(TM) bulk liquid delivery technology, EpiVapor provides gas phase delivery of chemical vapors such as trimethylgallium (TMG) and trimethylaluminum (TMA) directly to multiple deposition tools in a safe, reproducible fashion. Flexible enough to connect to up to eight independent tools, the continuous delivery of metalorganic vapors offers a truly uninterrupted solution in the fabrication of semiconductor devices. The EpiVapor's design ensures precursor flux stability in hydrogen (or other inert gas) carrier gas throughout the life of the ampoule, while adjustable parameters ensure that processes can be run at full capacity without stoppages to change out the tool bubblers. This optimizes process efficiency, reduces operational costs and increases safety, without compromising ultra high performance levels.

"As the MOCVD industry moves into high volume manufacturing, overall cost of ownership (COO) has become an important consideration in cost control," commented SAFC Hitech President Barry Leese. "Reducing the cost of transporting metalorganic
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SOURCE Sigma-Aldrich
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