Navigation Links
SAFC Hitech Launches Metalorganic Bulk Vapor Distribution System for Compound Semiconductor Manufacturing

EpiVapor Extends proven EpiFill Technology to Optimize Efficiency and

Safety and Reduce Cost of Ownership

ST. LOUIS, June 2 /PRNewswire-FirstCall/ -- SAFC Hitech(TM), a focus area within SAFC(R), a member of the Sigma-Aldrich Group (Nasdaq: SIAL), today announced the introduction of EpiVapor(TM), a metalorganic vapor phase distribution system for compound semiconductor manufacturing. EpiVapor eliminates the need for localized tool bubblers and TCU's by delivering vapors from highly volatile and sensitive pyrophoric liquids directly to MOCVD systems, allowing manufacturers to realize considerable cost savings.

An extension of SAFC Hitech's industry-proven EpiFill(TM) bulk liquid delivery technology, EpiVapor provides gas phase delivery of chemical vapors such as trimethylgallium (TMG) and trimethylaluminum (TMA) directly to multiple deposition tools in a safe, reproducible fashion. Flexible enough to connect to up to eight independent tools, the continuous delivery of metalorganic vapors offers a truly uninterrupted solution in the fabrication of semiconductor devices. The EpiVapor's design ensures precursor flux stability in hydrogen (or other inert gas) carrier gas throughout the life of the ampoule, while adjustable parameters ensure that processes can be run at full capacity without stoppages to change out the tool bubblers. This optimizes process efficiency, reduces operational costs and increases safety, without compromising ultra high performance levels.

"As the MOCVD industry moves into high volume manufacturing, overall cost of ownership (COO) has become an important consideration in cost control," commented SAFC Hitech President Barry Leese. "Reducing the cost of transporting metalorganic chemicals to the tool plays a significant part in reducing overall COO. In addition, the reliable, flexible and highly controllable dosimetry of organometallic precursors is of paramount importance in production environments where downtime is prohibitively expensive. The success we have seen with our EpiFill technology for pyrophoric materials motivated us to develop a vapor distribution system. With the introduction of the EpiVapor system we are reducing both system down time and the amount of hardware used per tool, eliminating the need of multiple Temperature Controller Units and enabling automation and bulk chemical change out in an arrangement that can be tailored for the specific requirements of the customer."

The EpiVapor system is comprised of an electronic and chemical element. The electronic component features a user-friendly LCD touch screen display that shows the process flow diagram and user interface. The touch screen displays an array of information including bulk tank liquid levels, valve configurations, fluid and vapor flow paths and system pressure/vacuum, that make the operation of the unit in both automatic (auto) and manual (service) modes very simple, as well as an alarm screen, recipe screens, programmable set points and multilevel password protection for added security.

The chemical section of the EpiVapor system consists of a cabinet which is enhanced for the use of pyrophoric materials with smoke detectors, audible and visual alarms, a watchdog system for automatic operation, optional UV/IR flame detector, 110% containment spill tray, and manifold with fail safe pneumatic valves. The EpiVapor system is both S2-93/98 and S2-0200 certified and is CE marked, meeting all of the relevant European directives.

The other components built into the system are a pressure transducer, pressure controller, a Venturi vacuum generator, a vaporizer bubbler fitted with continuous and fixed level sensors and a TCR2000R temperature control unit (TCU).

Applications for the EpiVapor system include:

-- Precursor vapor delivery for production environment MOCVD/ALD

deposition systems employed to fabricate semiconductor devices

-- TMG delivery for MOVPE HBTs and HBLEDs

-- DEZ and TMG delivery for MOCVD Solar Cells

-- TMA delivery for ALD high-k Al2O3 for logic, memory, and MEMS devices

-- Other high volatility III-V and silicon semiconductor precursors

The EpiVapor system is available now. For more information, please visit

About SAFC Hitech: SAFC Hitech provides a unique chemistry service translating application understanding into performance materials worldwide. Through collaborative partnerships and an integrated approach from research and development, process development and scale up to commercial manufacturing, SAFC Hitech invests in innovation and manufacturing enabling current and future technology needs. Further information can be found at

About SAFC: SAFC(R) is the custom manufacturing and services group within Sigma-Aldrich that focuses on high-purity inorganics for high technology applications, cell culture products and services for biopharmaceutical manufacturing, biochemical production and the manufacturing of complex, multi-step organic synthesis of APIs and key intermediates. SAFC has manufacturing facilities around the world dedicated to providing manufacturing services for companies requiring a reliable partner to produce their custom manufactured materials. SAFC has four focus areas -- SAFC Pharma(TM), SAFC Supply Solutions(R), SAFC Biosciences(TM), and SAFC Hitech(TM) -- and had annual sales of nearly $600 million in 2007. SAFC is one of the world's 10 largest fine chemical businesses. For more information about SAFC, visit

About Sigma-Aldrich: Sigma-Aldrich is a leading Life Science and High Technology company. Its biochemical and organic chemical products and kits are used in scientific and genomic research, biotechnology, pharmaceutical development, the diagnosis of disease and as key components in pharmaceutical and other high technology manufacturing. The Company has customers in life science companies, university and government institutions, hospitals, and in industry. Over one million scientists and technologists use its products. Sigma-Aldrich operates in 36 countries and has 7,900 employees providing excellent service worldwide. Sigma-Aldrich is committed to Accelerating Customer Success through Leadership in Life Science, High Technology and Service. For more information about Sigma-Aldrich, please visit its award-winning website at

SAFC(R), SAFC Supply Solutions(R) and Sigma-Aldrich(R) are registered trademarks and SAFC Pharma(TM), SAFC Biosciences(TM) and SAFC Hitech(TM) are trademarks of Sigma-Aldrich Biotechnology L.P. and Sigma-Aldrich Co.

SOURCE Sigma-Aldrich
Copyright©2008 PR Newswire.
All rights reserved

Related biology technology :

1. SAFC Hitech Introduces Large Scale Bubbler for Compound Semiconductor Production
2. SAFC Hitech(TM) Expands Sheboygan Facility With State-of-the-Art Manufacturing Cleanroom
3. SAFC Hitech(TM) Plans Further Expansion Into Asia
4. SAFC Hitech(TM) Joins Aviza and ST Microelectronics for Solid State Technology ALD Webcast
5. Ipsogen Launches MapQuant Dx(TM) Genomic Grade Test to Identify Breast Cancer Patients who Benefit From Chemotherapy
6. Gen-Probe Launches in Europe CE-Marked APTIMA(R) HPV Assay for Detection of Human Papillomavirus
7. Smith & Nephew Endoscopy Launches New, Reusable Cannula Line for Hip Arthroscopy
8. Abbott Launches Next-Generation StarClose(R) SE Vascular Closure System
9. Shire Launches Nationwide Adult ADHD Mobile Awareness Tour
10. BioSpace Launches 6th Edition of Bio NC(TM) Hotbed Campaign
11. Enterix Inc. Launches Its Point-of-Care Test for Colorectal Cancer Screening
Post Your Comments:
(Date:11/24/2015)... 24, 2015  Asia-Pacific (APAC) holds the third-largest ... market. The trend of outsourcing to low-cost locations ... higher volume share for the region in the ... margins in the CRO industry will improve. ... ( ), finds that the market earned ...
(Date:11/24/2015)... ... November 24, 2015 , ... ... But unless it is bound to proteins, copper is also toxic to cells. ... at Worcester Polytechnic Institute (WPI) will conduct a systematic study of copper in ...
(Date:11/24/2015)... ... , ... This fall, global software solutions leader SAP and AdVenture Capital brought ... pitch their BIG ideas to improve health and wellness in their schools. , Now, ... the title of SAP's Teen Innovator, an all-expenses paid trip to Super Bowl 50, ...
(Date:11/24/2015)... 24, 2015 /PRNewswire/ - Aeterna Zentaris Inc. (NASDAQ: ... the remaining 11,000 post-share consolidation (or 1,100,000 pre-share ... "Series B Warrants") subject to the previously disclosed ... 23, 2015, which will result in the issuance ... to the issuance of such shares, there will ...
Breaking Biology Technology:
(Date:10/29/2015)... ANN ARBOR, Mich. , Oct. 29, 2015 ... with Eurofins Genomics for U.S. distribution of its ... DNA-seq kit and Rubicon,s new ThruPLEX Plasma-seq ... DNA to enable the preparation of NGS libraries ... in plasma for diagnostic and prognostic applications in ...
(Date:10/27/2015)... -- Munich, Germany , October ... automatically maps data from mobile eye tracking videos created ... that they can be quantitatively analyzed with SMI,s analysis ... , October 28-29, 2015. SMI,s Automated Semantic Gaze ... tracking videos created with SMI,s Eye Tracking Glasses ...
(Date:10/23/2015)... Research and Markets ( ) has ... Biometrics Market 2015-2019" report to their offering. ... global voice recognition biometrics market to grow at a ... --> --> The report, Global Voice ... an in-depth market analysis with inputs from industry experts. ...
Breaking Biology News(10 mins):