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SAFC Hitech Introduces Large Scale Bubbler for Compound Semiconductor Production
Date:6/1/2008

ST. LOUIS, June 2 /PRNewswire-FirstCall/ -- SAFC Hitech(TM), a focus area within SAFC(R), a member of the Sigma-Aldrich Group (Nasdaq: SIAL), today announced the introduction of the OM700, a bubbler that offers customers a cost-efficient migration path to controlled precursor delivery for larger lot sizes, enabling a reduction in process downtime, combined with increased safety controls.

The OM700 offers reliable and very controllable dosimetry of highly sensitive organometallic precursors, such as trimethylgallium (TMG), trimethylaluminum (TMA) and triethylgallium (TEG), in production environments where downtime is prohibitively expensive. The large capacity of the OM700, which can support up to 13 kg of precursor, reduces the frequency of container change outs, thereby minimizing downtime and bubbler manipulation safety hazards by enabling larger batch sizes. Additionally, the OM700's flux stability covers a range of operating temperatures from -10 degrees C to +30 degrees C, and ensures that all processes can be run at peak efficiency.

The combination of advantages associated with the OM700 in a production environment results in reduced operational costs without compromised performance. In existing large bubbler technology, maintaining temperature control is often difficult because they use conventional heater baths. Another limitation of current bubbler technology is that the size of the bubbler itself is restricted to that of the installed bath. The OM700 overcomes these issues with an independent heating jacket and thermal control system that enable an increased volume to accommodate over nine liters of metal alkyl, while still maintaining strict temperature and operational controls.

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SOURCE Sigma-Aldrich
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