Navigation Links
New process creates 3-D nanostructures with magnetic materials
Date:6/26/2008

Materials scientists at the National Institute of Standards and Technology (NIST) have developed a process to build complex, three-dimensional nanoscale structures of magnetic materials such as nickel or nickel-iron alloys using techniques compatible with standard semiconductor manufacturing. The process, described in a recent paper,* could enable whole new classes of sensors and microelectromechanical (MEMS) devices.

The NIST team also demonstrated that key process variables are linked to relatively quick and inexpensive electrochemical measurements, pointing the way to a fast and efficient way to optimize the process for new materials.

The NIST process is a variation of a technique called "Damascene metallization" that often is used to create complicated three-dimensional copper interconnections, the "wiring" that links circuit elements across multiple layers in advanced, large-scale integrated circuits. Named after the ancient art of creating designs with metal-in-metal inlays, the process involves etching complex patterns of horizontal trenches and vertical "vias" in the surface of the wafer and then uses an electroplating process to fill them with copper. The high aspect ratio features may range from tens of nanometers to hundreds of microns in width. Once filled, the surface of the disk is ground and polished down to remove the excess copper, leaving behind the trench and via pattern.

The big trick in Damascene metallization is ensuring that the deposited metal completely fills in the deep, narrow trenches without leaving voids. This can be done by adding a chemical to the electrodeposition solution to prevent the metal from building up too quickly on the sides of the trenches and by careful control of the deposition process, but both the chemistry and the process variables turn out to be significantly different for active ferromagnetic materials than for passive materials like copper. In addition to devising a working combination of electrolytes and additives to do Damascene metallization with nickel and a nickel-iron alloy, the NIST team demonstrated straightforward measurements for identifying and optimizing the feature-filling process thereby providing an efficient path for the creation of quality nanoscale ferromagnet structures.

The new process makes it feasible to create complex three-dimensional MEMS devices such as inductors and actuators that combine magnetic alloys with non-magnetic metallizations such as copper interconnects using existing production systems.


'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)
Source:Eurekalert

Related biology technology :

1. Processing Fees on ADRs to be Waived for two Months
2. AG Mednet Selected By Massachusetts General Hospital to Transport 3D Post-Processing Images
3. iGuard Transforms Drug Safety Alert and Update Process
4. Dr. Suwelack Skin & Health Care: New Product in the FDA Certification Process
5. Chambersburg Hospital Streamlines Pharmacy Process and Increases Patient Safety With Omnicell WorkflowRx 5.0
6. Thermo Fisher Scientific to Expand Manufacturing Operation for Single-Use Bioprocessing Containers
7. ScienceDirect Maximizes Research Capabilities, Enhances the Research Process
8. NanoMaterials Technology to Conduct Process Development Feasibility Study with US Based Emerging Pharmaceutical Company
9. Dragon Announces R&D Achievement in Biotech Manufacturing Process
10. Science Teachers Tour Ventrias Bioprocessing Facility
11. Blue dye could hold the key to super processing power
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:10/9/2017)... ... ... At its national board meeting in North Carolina, ARCS® Foundation ... Physics and Astronomy, has been selected for membership in ARCS Alumni Hall of ... Breakthrough Prize in Fundamental physics for the discovery of the accelerating expansion of the ...
(Date:10/7/2017)... Arizona (PRWEB) , ... October ... ... 15 years’ experience providing advanced instruments and applications consulting for microscopy and ... in-house expertise in application consulting, Nanoscience Analytical offers a broad range of ...
(Date:10/6/2017)... ... 2017 , ... The HealthTech Venture Network (HTVN) is proud ... annual Conference where founders, investors, innovative practitioners and collaborators are invited to a ... early stage digital health and med tech companies. , This day-long event will ...
(Date:10/5/2017)... ... October 05, 2017 , ... Understanding the microbiome, the millions of bacteria that ... Love: You Are My Future, the newest exhibit on display at the University City ... human condition through the lens of the gut microbiome. , Gut Love opens ...
Breaking Biology Technology:
(Date:6/14/2017)... , June 15, 2017  IBM (NYSE: IBM ) is ... tech event dedicated to developing collaboration between startups and global ... June 15-17. During the event, nine startups will showcase the ... in various industries. France ... international market, with a 30 percent increase in the number ...
(Date:5/16/2017)... , May 16, 2017  Veratad Technologies, LLC ... of online age and identity verification solutions, announced today ... Identity Conference 2017, May 15 thru May 17, 2017, ... Building and International Trade Center. Identity ... globe and in today,s quickly evolving digital world, defining ...
(Date:5/6/2017)... 5, 2017 RAM Group , ... new breakthrough in biometric authentication based on a ... properties to perform biometric authentication. These new sensors are ... created by Ram Group and its partners. This sensor ... supply chains and security. Ram Group is a ...
Breaking Biology News(10 mins):