Navigation Links
New paper reveals nanoscale details of photolithography process
Date:12/12/2007

otoresist transfers directly to the developed pattern, but the NIST measurements reveal a much more complicated process. By substituting deuterium-based heavy water in the chemistry, the NIST team was able to use neutrons to observe the entire process at a nanometer scale. They found that at the edges of exposed areas the photoresist components interact to allow the developer to penetrate several nanometers into the unexposed resist. This interface region swells up and remains swollen during the rinsing process, collapsing when the surface is dried. The magnitude of the swelling is significantly larger than the molecules in the resist, and the end effect can limit the ability of the photoresist to achieve the needed edge resolution. On the plus side, say the researchers, their measurements give new insight into how the resist chemistry could be modified to control the swelling to optimal levels.


'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)  
Source:Eurekalert

Page: 1 2

Related biology technology :

1. New White Paper Details Strategies for Biotechnology Companies to Improve EH&S Compliance
2. Free White Papers Detail Sterility Testing Essentials for Medical Device, Pharmaceutical Manufacturers
3. 454 Sequencing(TM): Science Paper Suggests That Structural Variation Plays an Important Role in Genetic Variation
4. New White Paper Details Six Steps to Investigate and Prevent Laboratory Accidents
5. Microtest Offers Free White Paper: Virus Testing for Biological Products: Partnering With a Contract Lab
6. Free White Paper Addresses Challenges of New FDA Regulations Awaiting Combo Product Manufacturers
7. New Survey Reveals Many Adults With High Cholesterol Fail to Take Necessary Steps to Improve Their Condition
8. CCMR gets $2.9M for training grad students in nanoscale science
9. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
10. CCMR gets $2.9M for training grad students in nanoscale science
11. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
New paper reveals nanoscale details of photolithography process
(Date:7/25/2014)... (PRWEB) July 25, 2014 At the ... has granted a 60-day extension for the public comment ... Special Rule for Model Aircraft established by Congress as ... 2012. The 60-day extension establishes the new deadline for ... States Department of Transportation/FAA notice published in the Federal ...
(Date:7/24/2014)... -- Keryx Biopharmaceuticals, Inc. (Nasdaq:KERX) (the "Company") announced the ... Phase 3 study of Zerenex (ferric citrate), the Company,s ... of hyperphosphatemia in patients with end-stage renal disease (ESRD) ... delivery with FErric CiTrate in EsrD) was published online ... of Nephrology ( JASN ). , ...
(Date:7/24/2014)... July 24, 2014 Gain recognition ... Supply Chain of the biotech industry. Nominations are ... Awards, brought to you by the Bio ... of supply chain management professionals for the past ... stakeholders of the Biotech industry – Manufacturers, Service ...
(Date:7/24/2014)... , July 24, 2014  Asterias Biotherapeutics, Inc. ... emerging field of regenerative medicine, announced today that ... presentation to investors on Tuesday, July 29, 2014, ... presentation will include an overview of Asterias, business ... webcast, visit http://www.ustream.tv/channel/asterias-biotherapeutics at least 15 ...
Breaking Biology Technology:FAA Grants Comment Extension at the Request of AMA 2Zerenex (ferric citrate) long-term Phase 3 study results published in JASN 2Zerenex (ferric citrate) long-term Phase 3 study results published in JASN 3Zerenex (ferric citrate) long-term Phase 3 study results published in JASN 4Call for Submission: BSMA’s Supply Chain Management Innovation Awards 2Call for Submission: BSMA’s Supply Chain Management Innovation Awards 3Asterias Biotherapeutics Announces Live Investor Webcast 2Asterias Biotherapeutics Announces Live Investor Webcast 3Asterias Biotherapeutics Announces Live Investor Webcast 4
... NEW ORLEANS, and RESEARCH TRIANGLE PARK, N.C., Nov. ... presented in vitro data demonstrating that ... not substrates for the human Organic Anion Transporters ... cause nephrotoxicity via this mechanism.  These data, presented ...
... Health Invites Medisafe 1 Technologies to Demonstrate its... -- JERUSALEM, November 16, 2010 ... ... if (typeof(lpUnit)==,undefined,) var lpUnit=,PRN,; --> ... ""; BitlyCB.alertResponse = function(data) { var s = ,; var first_result; // Results are keyed by longUrl, so we ...
... SHENYANG, China, Nov. 15, 2010 /PRNewswire-Asia-FirstCall/ -- 3SBio Inc. ... a leading China-based biotechnology company focused on researching, developing, ... financial results for the third quarter ended September 30, ... Highlights: Total net revenues increased ...
Cached Biology Technology:Chimerix's PIM Conjugate Technology Reduces Risk of Nephrotoxicity for CMX001 and CMX157 2Chimerix's PIM Conjugate Technology Reduces Risk of Nephrotoxicity for CMX001 and CMX157 3Chimerix's PIM Conjugate Technology Reduces Risk of Nephrotoxicity for CMX001 and CMX157 4The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 2The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 3The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 4The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 5The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 6The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 7The Israeli Government's Ministry of Health Invites Medisafe 1 Technologies to Demonstrate its Unique Syringe Locking Device Technology 83SBio Inc. Announces Unaudited Third Quarter Results 23SBio Inc. Announces Unaudited Third Quarter Results 33SBio Inc. Announces Unaudited Third Quarter Results 43SBio Inc. Announces Unaudited Third Quarter Results 53SBio Inc. Announces Unaudited Third Quarter Results 63SBio Inc. Announces Unaudited Third Quarter Results 73SBio Inc. Announces Unaudited Third Quarter Results 83SBio Inc. Announces Unaudited Third Quarter Results 93SBio Inc. Announces Unaudited Third Quarter Results 103SBio Inc. Announces Unaudited Third Quarter Results 113SBio Inc. Announces Unaudited Third Quarter Results 123SBio Inc. Announces Unaudited Third Quarter Results 133SBio Inc. Announces Unaudited Third Quarter Results 143SBio Inc. Announces Unaudited Third Quarter Results 153SBio Inc. Announces Unaudited Third Quarter Results 163SBio Inc. Announces Unaudited Third Quarter Results 173SBio Inc. Announces Unaudited Third Quarter Results 18
(Date:7/24/2014)... where electric cars ply silent freeways, solar panels blanket ... the earth, from howling winds and from the blazing ... it is technically and economically feasible to convert California,s ... energy. Published in Energy , the plan shows ... supply in California that could create tens of thousands ...
(Date:7/24/2014)... has its own microbial terroir, meaning the microbial populations ... in the product, creating the final flavor according to ... Applied and Environmental Microbiology . This is the first ... sake brewery. , Many sake makers inoculate with ... Mills of the University of California, Davis, but he ...
(Date:7/24/2014)... O.D., a low vision specialist at The University of ... has been awarded a grant to help Harris County ... medication or surgery. , Even with corrective lenses, many ... However, there are a variety of low vision devices, ... offset their vision loss. , Iyer is using the ...
Breaking Biology News(10 mins):Stanford study shows how to power California with wind, water and sun 2Stanford study shows how to power California with wind, water and sun 3Stanford study shows how to power California with wind, water and sun 4The microbes make the sake brewery 2UTHealth Dr. Bhavani Iyer awarded low vision grant 2
... many good things into the world: efficient solar power, ... in biomedical imaging among them. But they ... Rice researchers has been working to discover the health ... generally composed of heavy metals surrounded by an organic ...
... ARTICLE #1 FOR IMMEDIATE RELEASE Edible fungus ... Food Chemistry Scientists in Florida report that ... help to reduce the serious side effects that can ... juice. Their study is in the January 14 edition ...
... most dependent on fish imports. This situation is due in part ... collapse of fish stocks, which have also been observed in Sweden. ... and high prices lead to a decrease in consumption, which in ... healthy diet. The fact that we make use of fish stocks ...
Cached Biology News:Rice eyes risks of quantum dots 2American Chemical Society's Weekly PressPac -- Jan. 28, 2009 2American Chemical Society's Weekly PressPac -- Jan. 28, 2009 3American Chemical Society's Weekly PressPac -- Jan. 28, 2009 4American Chemical Society's Weekly PressPac -- Jan. 28, 2009 5American Chemical Society's Weekly PressPac -- Jan. 28, 2009 6Research project to boost European fish farming 2
Bovine Serum Albumin Heat Shock Diagnostic Grade Powder...
MpV17 transgene, murine homolog, glomerulosclerosis...
... the premium quality siRNAs you need for ... be readily ordered online by providing either ... providing the sense and antisense siRNA sequences. ... Silencer Pre-designed siRNAs, which are already designed ...
Human SDNSF/MCFD2 Biotinylated Affinity Purified PAb...
Biology Products: