Navigation Links
New paper reveals nanoscale details of photolithography process
Date:12/12/2007

Scientists at the National Institute of Standards and Technology (NIST) have made the first direct measurements of the infinitesimal expansion and collapse of thin polymer films used in the manufacture of advanced semiconductor devices. Its a matter of only a couple of nanometers, but it can be enough to affect the performance of next-generation chip manufacturing. The NIST measurements, detailed in a new paper,* offer a new insight into the complex chemistry that enables the mass production of powerful new integrated circuits.

The smallest critical features in memory or processor chips include transistor gates. In todays most advanced chips, gate length is about 45 nanometers, and the industry is aiming for 32-nanometer gates. To build the nearly one billion transistors in modern microprocessors, manufacturers use photolithography, the high-tech, nanoscale version of printing technology. The semiconductor wafer is coated with a thin film of photoresist, a polymer-based formulation, and exposed with a desired pattern using masks and short wavelength light (193 nm). The light changes the solubility of the exposed portions of the resist, and a developer fluid is used to wash the resist away, leaving the pattern which is used for further processing.

Exactly what happens at the interface between the exposed and unexposed photoresist has become an important issue for the design of 32-nanometer processes. Most of the exposed areas of the photoresist swell slightly and dissolve away when washed with the developer. However this swelling can induce the polymer formulation to separate (like oil and water) and alter the unexposed portions of the resist at the edges of the pattern, roughening the edge. For a 32-nanometer feature, manufacturers want to hold this roughness to at most about two or three nanometers.

Industry models of the process have assumed a fairly simple relationship in which edge roughness in the exposed latent image in the ph
'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)  
Source:Eurekalert

Page: 1 2

Related biology technology :

1. New White Paper Details Strategies for Biotechnology Companies to Improve EH&S Compliance
2. Free White Papers Detail Sterility Testing Essentials for Medical Device, Pharmaceutical Manufacturers
3. 454 Sequencing(TM): Science Paper Suggests That Structural Variation Plays an Important Role in Genetic Variation
4. New White Paper Details Six Steps to Investigate and Prevent Laboratory Accidents
5. Microtest Offers Free White Paper: Virus Testing for Biological Products: Partnering With a Contract Lab
6. Free White Paper Addresses Challenges of New FDA Regulations Awaiting Combo Product Manufacturers
7. New Survey Reveals Many Adults With High Cholesterol Fail to Take Necessary Steps to Improve Their Condition
8. CCMR gets $2.9M for training grad students in nanoscale science
9. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
10. CCMR gets $2.9M for training grad students in nanoscale science
11. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
New paper reveals nanoscale details of photolithography process
(Date:7/22/2014)... OHAUS Corporation, a leading worldwide manufacturer ... scales, proudly announces its Explorer line of analytical ... 2014 “Readers' Choice” Award for best balance. ... was voted the best laboratory balance by the ... “excellence in product design and performance for the ...
(Date:7/22/2014)... SHENZHEN , Cina, 22 luglio 2014 ... una filiale di BGI, la maggiore organizzazione di genomica ... nuovo servizio di sequenziamento dell,intero esoma umano con base ... Complete Genomics, molto apprezzata nel settore per ... con il 99.999% di precisione e una rilevazione altamente ...
(Date:7/22/2014)... PITTSBURGH , July 22, 2014 ... maker of MD-Cu 29 antimicrobial copper announces Pullman ... to the first EPA-registered antimicrobial solid touch surface, at ... than 99.9% of MRSA, E-coli and other bacteria within 2 ... hospital in protecting against bacteria and infectious diseases in ...
(Date:7/22/2014)... , July 22, 2014  The Broad Institute ... from philanthropist Ted Stanley aimed at ... new treatments based on molecular understanding to hundreds ... The Stanley commitment – the largest ... for scientific research in general – will support ...
Breaking Biology Technology:OHAUS Explorer Voted “Best Balance” in Laboratory Equipment’s 2014 Readers’ Choice Awards 2BGI Tech lancia un servizio di sequenziamento dell'intero esoma umano sulla piattaforma avanzata di Complete Genomics 2Pullman Regional Hospital changes more than 1,100 touch points to Hussey Copper's MD-Cu29 antimicrobial copper to help protect against bacteria 2Pullman Regional Hospital changes more than 1,100 touch points to Hussey Copper's MD-Cu29 antimicrobial copper to help protect against bacteria 3$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 2$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 3$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 4$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 5$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 6$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 7$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 8$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 9$650 million commitment to Stanley Center at Broad Institute aims to galvanize mental illness research 10
... May 24, 2012  Novocure™, a commercial stage private oncology ... centers of excellence will join the seven existing clinical ... to patients with recurrent GBM. These fifteen clinical centers ... GBM is both the deadliest and ...
... NEW YORK, May 23, 2012 Exosome Diagnostics, ... for use in personalized and non-invasive cancer diagnostics, ... utility of non-invasive sampling of patients, urine to ... In the first study, the presence of a ...
... imaging system that scans 3D models of historical buildings using ... a human pilot onboard. This is the first 3D imaging ... technologies, and virtual representation of models to produce a realistic ... this project is to obtain a 3D model of a ...
Cached Biology Technology:Novocure™ Certifies Eight Additional Clinical Centers of Excellence to Treat Most Common Brain Tumor with Tumor Treating Fields (TTFields) Therapy 2Novocure™ Certifies Eight Additional Clinical Centers of Excellence to Treat Most Common Brain Tumor with Tumor Treating Fields (TTFields) Therapy 3Novocure™ Certifies Eight Additional Clinical Centers of Excellence to Treat Most Common Brain Tumor with Tumor Treating Fields (TTFields) Therapy 4Exosome Diagnostics Presents Data at American Urology Association Demonstrating Potential Utility of Urine Exosomes to Non-invasively Detect and Manage Prostate Cancer 2Exosome Diagnostics Presents Data at American Urology Association Demonstrating Potential Utility of Urine Exosomes to Non-invasively Detect and Manage Prostate Cancer 3A new imaging system produces 3-D models of monuments using unmanned aircraft 2
(Date:7/21/2014)... researchers have detected genetic fragments of Middle East Respiratory ... holding a camel infected with the virus. The work, ... open-access journal of the American Society for Microbiology, indicates ... disease can be transmitted through the air. , MERS, ... has been identified in 699 people as of June ...
(Date:7/21/2014)... ROUGE LSU,s Mark Batzer, Boyd Professor and Dr. ... Sciences in the College of Science, contributed to an ... titled "The Common Marmoset Genome Provides Insight into Primate ... Batzer contributed analysis of "jumping genes," or mobile elements ... mechanism in the genome. The marmoset is important because ...
(Date:7/21/2014)... every movement, researchers have shown for the first time ... farms and pipelines. Those man-made structures probably serve as ... study published in the Cell Press journal Current ... shocked when I first saw the stunning grid pattern ... wind farm in the United Kingdom, says Deborah Russell ...
Breaking Biology News(10 mins):Middle East Respiratory Syndrome coronavirus detected in the air of a Saudi Arabian camel barn 2LSU's Mark Batzer contributes to Nature Genetics article on marmoset genome 2Seals forage at offshore wind farms 2
... is a newly published careers book written specifically ... contains essential information about the job market, how ... advice on improving CV writing and interview technique. ... biologists who have forged successful careers within and ...
... director-general of the World Health Organization warned of "an ... the not-too-distant future, said Margaret Chan, "Things as common ... once again kill." , The culprit: the growing ability ... phenomenon known as antibiotic resistance. Chan singled out several ...
... on earth, yet their unique relationship with fire makes them ... of these giants, published in New Phytologist , seeks ... a debate which may determine their future. Gigantic trees ... 100,000 global tree species only 50, less than 0.005%, reach ...
Cached Biology News:WSU researcher to study ecology of antibiotic resistance 2Do Australia's giant fire-dependent trees belong in the rainforest? 2
... demand is causing shortages in your laboratory or ... cause unwanted distractions, problems and delays. ... work and endeavour! Bring us your idea and ... internationally. We work under ISO 9001 quality assurance ...
... EKMax™ is a recombinant preparation of ... EKMax™ Enterokinase is expressed and isolated from ... highly purified enzyme preparation (2). It recognizes ... bond after the lysine residue. The enzyme ...
... interferons are cytopathic effect inhibition assays, also known ... include; tissue culture supernatents; serum from PK studies ... unit is defined as the quantity of interferon ... of viral infection by 50%. All ...
...
Biology Products: