Navigation Links
New paper reveals nanoscale details of photolithography process
Date:12/12/2007

Scientists at the National Institute of Standards and Technology (NIST) have made the first direct measurements of the infinitesimal expansion and collapse of thin polymer films used in the manufacture of advanced semiconductor devices. Its a matter of only a couple of nanometers, but it can be enough to affect the performance of next-generation chip manufacturing. The NIST measurements, detailed in a new paper,* offer a new insight into the complex chemistry that enables the mass production of powerful new integrated circuits.

The smallest critical features in memory or processor chips include transistor gates. In todays most advanced chips, gate length is about 45 nanometers, and the industry is aiming for 32-nanometer gates. To build the nearly one billion transistors in modern microprocessors, manufacturers use photolithography, the high-tech, nanoscale version of printing technology. The semiconductor wafer is coated with a thin film of photoresist, a polymer-based formulation, and exposed with a desired pattern using masks and short wavelength light (193 nm). The light changes the solubility of the exposed portions of the resist, and a developer fluid is used to wash the resist away, leaving the pattern which is used for further processing.

Exactly what happens at the interface between the exposed and unexposed photoresist has become an important issue for the design of 32-nanometer processes. Most of the exposed areas of the photoresist swell slightly and dissolve away when washed with the developer. However this swelling can induce the polymer formulation to separate (like oil and water) and alter the unexposed portions of the resist at the edges of the pattern, roughening the edge. For a 32-nanometer feature, manufacturers want to hold this roughness to at most about two or three nanometers.

Industry models of the process have assumed a fairly simple relationship in which edge roughness in the exposed latent image in the ph
'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)  
Source:Eurekalert

Page: 1 2

Related biology technology :

1. New White Paper Details Strategies for Biotechnology Companies to Improve EH&S Compliance
2. Free White Papers Detail Sterility Testing Essentials for Medical Device, Pharmaceutical Manufacturers
3. 454 Sequencing(TM): Science Paper Suggests That Structural Variation Plays an Important Role in Genetic Variation
4. New White Paper Details Six Steps to Investigate and Prevent Laboratory Accidents
5. Microtest Offers Free White Paper: Virus Testing for Biological Products: Partnering With a Contract Lab
6. Free White Paper Addresses Challenges of New FDA Regulations Awaiting Combo Product Manufacturers
7. New Survey Reveals Many Adults With High Cholesterol Fail to Take Necessary Steps to Improve Their Condition
8. CCMR gets $2.9M for training grad students in nanoscale science
9. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
10. CCMR gets $2.9M for training grad students in nanoscale science
11. Penn engineers design computer memory in nanoscale form that retrieves data 1,000 times faster
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
New paper reveals nanoscale details of photolithography process
(Date:7/11/2014)... 11, 2014  Researchers have pioneered a revolutionary ... new technology, called Virtual Finger, allows scientists to ... neurons and synapses using the flat surface of ... 3D imaging studies orders of magnitude more efficient, ... level across many areas of experimental biology. The ...
(Date:7/10/2014)... 10, 2014 Deep Knowledge Ventures ... Forum on ‘Commercialising Longevity Research’ and welcomed a ... the London Bioscience Innovation Center for the event, ... Aging Analytics Ltd. The meeting highlighted the need ... research for age-related disease, as well as the ...
(Date:7/10/2014)... Robert Harman, DVM, Founder and CEO of Vet-Stem, Inc., the ... relaunch of his highly informative blog, now named Stem Cells ... are Stem Cells ?” Dr. Harman’s purpose for blogging ... basics of stem cell therapy so that pet owners can ... when considering regenerative medicine. , A veterinarian by trade, Dr. ...
(Date:7/10/2014)... CROWN POINT, Ind. , July 10, ... recently expanded its use of capnography for ... a growing group of healthcare leaders in ... Capnography measures how effectively patients are breathing ... respiratory depression occurs. By measuring the amount ...
Breaking Biology Technology:Virtual Finger Enables Scientists To Navigate And Analyze 3D Images Of Complex Biological Structures 2Virtual Finger Enables Scientists To Navigate And Analyze 3D Images Of Complex Biological Structures 3DKV Sponsors Forum on Commercialising Longevity Research; Brings Together Scientists, Investors, Entrepreneurs and Celebrities 2DKV Sponsors Forum on Commercialising Longevity Research; Brings Together Scientists, Investors, Entrepreneurs and Celebrities 3DKV Sponsors Forum on Commercialising Longevity Research; Brings Together Scientists, Investors, Entrepreneurs and Celebrities 4DKV Sponsors Forum on Commercialising Longevity Research; Brings Together Scientists, Investors, Entrepreneurs and Celebrities 5DKV Sponsors Forum on Commercialising Longevity Research; Brings Together Scientists, Investors, Entrepreneurs and Celebrities 6Robert Harman, DVM Talks About What Stem Cells are in His Latest Blog Series for Vet-Stem, Inc. 2Robert Harman, DVM Talks About What Stem Cells are in His Latest Blog Series for Vet-Stem, Inc. 3Franciscan St. Anthony Health-Crown Point Underscores Patient Safety Commitment Through Expanded Use of Capnography 2
... Panacea Pharmaceuticals,Inc. announced today that BC Detect(SM), ... now available from Panacea Laboratories. BC,Detect(SM) is ... the identification,of recurrence among women successfully treated ... Panacea Pharmaceuticals, is certified under the,Clinical Laboratory ...
... of anti-infectives, to ... on pexiganan development, WELLESLEY HILLS, Mass., Oct. 17 ... of rights to pexiganan, Michael Zasloff, M.D. has joined the,company,s ... the African clawed frog while at NIH (National Institutes of,Health) ...
... October 24, at 1:30 p.m. EDT, ALAMEDA, ... ), a biopharmaceutical company developing innovative therapies,for the ... call to discuss third quarter results on Wednesday, ... PDT). Kenneth Chahine, Chief Executive,Officer, and Michael Coffee, ...
Cached Biology Technology:Panacea Pharmaceuticals Announces the Availability of BC Detect(SM), a Serum- Based Diagnostic Test for Breast Cancer 2Panacea Pharmaceuticals Announces the Availability of BC Detect(SM), a Serum- Based Diagnostic Test for Breast Cancer 3Panacea Pharmaceuticals Announces the Availability of BC Detect(SM), a Serum- Based Diagnostic Test for Breast Cancer 4MacroChem Announces Michael Zasloff, M.D., Ph.D. Joins Company's Scientific Advisory Board 2MacroChem Announces Michael Zasloff, M.D., Ph.D. Joins Company's Scientific Advisory Board 3MacroChem Announces Michael Zasloff, M.D., Ph.D. Joins Company's Scientific Advisory Board 4MacroChem Announces Michael Zasloff, M.D., Ph.D. Joins Company's Scientific Advisory Board 5Avigen, Inc. Announces Third Quarter 2007 Earnings Conference Call 2
(Date:7/11/2014)... July 3, 2014, Shenzhen, China Researchers from Salk ... for the first time evaluated the safety and ... and successfully developed a new method, TALEN-HDAdV, which ... pluripotent stem cell (hiPSC). This study published online ... important theoretical foundation for stem cell-based gene therapy. ...
(Date:7/11/2014)... An international team of researchers, including scientists from the ... just a reported a major step in understanding photosynthesis, ... now maintains the oxygen in its atmosphere and which ... on earth. , The researchers report the first ... reaction, namely the step in which a specific protein ...
(Date:7/11/2014)... Researchers have pioneered a revolutionary new way to ... Virtual Finger, allows scientists to move through digital ... using the flat surface of their computer screens. ... orders of magnitude more efficient, saving time, money ... areas of experimental biology. The software and its ...
Breaking Biology News(10 mins):A new genome editing method brings the possibility of gene therapies closer to reality 2A first direct glimpse of photosynthesis in action 2Virtual finger enables scientists to navigate and analyze complex 3D images 2
... 13, 2012) The blood-brain barrier is essential for maintaining ... and isolating the brain,s specific hormonal and neurotransmitter activity from ... addition to nerve cells, the brain contains glia cells that ... blood-brain boundary is made by glia joined into an envelope ...
... DC - On January 18, 2012, Dr. Peter ... National Homeland Security Research Center in the Office ... Protection Agency, will lead a session titled "National ... national resilience to bioterrorism threats involves maximizing advanced ...
... previously un-named species of horse fly whose appearance is dominated ... honour of American pop diva, Beyonc a member of ... single, Bootylicious. , According to the Australian National Insect Collection ... ( Plinthina ) beyonceae , CSIRO,s Bryan Lessard, ...
Cached Biology News:Brain glia cells increase their DNA content to preserve vital blood-brain barrier 2Fly named in honor of Beyonce 2
Mouse monoclonal antibody to PARK2 - Parkinson disease (autosomal recessive, juvenile) 2, parkin...
... used to quantitate double-stranded DNA (dsDNA) in solution, ... With this kit, DNA is stained with Hoechst ... VersaFluor or other fluorometer. The kit quantitates dsDNA ... to 5 micrograms per ml and contains Hoechst ...
... enterprise-scale sequence analysis software with the DeCypher Engine ... DeCypher, you can perform searches like these from ... NT database in under 6 days ... Use HMM analysis to compare 100,000 ...
...
Biology Products: