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New Turbomolecular Pumping System From Varian, Inc. Delivers Portable, Dry, Ultra-high Vacuum.
Date:7/30/2008

PALO ALTO, Calif., July 30 /PRNewswire-FirstCall/ -- Varian, Inc. (NasdaqGS: VARI) announced today an addition to its line of turbomolecular pumping systems. The TPS-compact provides plug-and-play, hydrocarbon free, ultra-high vacuum pumping in both bench-top and mobile models backed by a light (max weight 19.1kg/42.1lbs.) scroll pump.

The portable, fully integrated turbo pumping system is powered by either the Turbo-V 81 MacroTorr(TM) or Turbo-V 301 Navigator(TM) pumps, including control and communications software, and backed by the Varian IDP-3 Dry Scroll (60 L/min) primary pump. The ability to operate and read the Inverted Magnetron and Full Range gauges makes the TPS-compact the most cost-effective dry turbo-pumping system for monitoring and managing the operating vacuum conditions. This feature also makes it ideal as a roughing pump for ion pumped Ultra-high vacuum systems.

The size and simplicity of the unit make clean, dry, ultra-high vacuum readily accessible for users in applications from electron microscopy to high energy physics. For example, the TPS-compact is ideal for maintaining vacuum in the column of an electron microscope during servicing or ensuring purity when evacuating load-lock chambers for semiconductor manufacturing. Additionally, the TPS-compact is the most suitable dry solution for fast pump-down of larger machine sections or beam lines where cleanliness is essential. The dry combination of a scroll pump and the turbo pump avoids any contamination of the evacuated space during maintenance or operation. The TPS-compact may be mounted in any position, making it suitable for most system configurations.

The system is capable of pumping down small and medium volumes very quickly and the scroll pump backing extends the life of the turbomolecular pump, reducing its power consumption by 30%. It can be serviced on-site by customers and is designed to be accessed easily for service. In addition to gauge pressure, the lar
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SOURCE Varian, Inc.
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