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New '3-D' transistors promising future chips, lighter laptops
Date:12/6/2011

igher insulating value, or "dielectric constant," such as hafnium dioxide or aluminum oxide.

In the new work, the researchers applied a dielectric coating made of aluminum oxide using a method called atomic layer deposition. Because atomic layer deposition is commonly used in industry, the new design may represent a practical solution to the coming limits of conventional silicon transistors.

Using atomic layer deposition might enable engineers to design transistors having thinner oxide and metal layers for the gates, possibly consuming far less electricity than silicon devices.

"A thinner dielectric layer means speed goes up and voltage requirements go down," Ye said.

The work is funded by the National Science Foundation and the Semiconductor Research Corp. and is based at the Birck Nanotechnology Center in Purdue's Discovery Park. The latest research is similar to, but fundamentally different from, research reported by Ye's group in 2009. That work involved a design called a finFET, for fin field-effect transistor, which uses a finlike structure instead of the conventional flat design. The new design uses nanowires instead of the fin design.


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Contact: Emil Venere
venere@purdue.edu
765-494-4709
Purdue University
Source:Eurekalert

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