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Nanoscale dimensioning is fast, cheap with new NIST optical technique
Date:10/29/2008

ulated images to obtain best-match images with the intent of determining if each nanoparticle passes or fails.

This new imaging technology requires a research-quality optical microscope, a camera and a microscope stage that can move at preset distances. The setup is easily under $50,000, which is much less expensive than electron or probe microscopes currently used for measuring materials at the nanoscale, Attota explains. This method is another approach to extend the range of optical microscopy from microscale to nanoscale dimensional analysis. So far, sensitivity to a 3 nm difference in line widths has been demonstrated in the laboratory.


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Contact: Evelyn Brown
evelyn.brown@nist.gov
301-975-5661
National Institute of Standards and Technology (NIST)
Source:Eurekalert  

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