Navigation Links
Nanoscale dimensioning is fast, cheap with new NIST optical technique
Date:10/29/2008

A novel technique* under development at the National Institute of Standards and Technology (NIST) uses a relatively inexpensive optical microscope to quickly and cheaply analyze nanoscale dimensions with nanoscale measurement sensitivity. Termed Through-focus Scanning Optical Microscope (TSOM) imaging, the technique has potential applications in nanomanufacturing, semiconductor process control and biotechnology.

Optical microscopes are not widely considered for checking nanoscale (below 100 nanometers) dimensions because of the limitation imposed by wavelength of lightyou cant get a precise image with a probe three times the objects size. NIST researcher Ravikiran Attota gets around this, paradoxically, by considering lots of bad (out-of-focus) images. This imaging uses a set of blurry, out-of-focus optical images for nanometer dimensional measurement sensitivity, he says. Instead of repeatedly focusing on a sample to acquire one best image, the new technique captures a series of images with an optical microscope at different focal positions and stacks them one on top of the other to create the TSOM image. A computer program Attota developed analyzes the image.

While Attota believes this simple technique can be used in a variety of applications, he has worked with two. The TSOM image can compare two nanoscale objects such as silicon lines on an integrated circuit. The software subtracts one image from the other. This enables sensitivity to dimensional differences at the nanoscaleline height, width or side-wall angle. Each type of difference generates a distinct signal.

TSOM has also been theoretically evaluated in another quality control application. Medical researchers are studying the use of gold nanoparticles to deliver advanced pharmaceuticals to specific locations within the human body. Perfect size will be critical. To address this application, a TSOM image of a gold nanoparticle can be taken and compared to a library of simulated images to obtain best-match images with the intent of determining if each nanoparticle passes or fails.

This new imaging technology requires a research-quality optical microscope, a camera and a microscope stage that can move at preset distances. The setup is easily under $50,000, which is much less expensive than electron or probe microscopes currently used for measuring materials at the nanoscale, Attota explains. This method is another approach to extend the range of optical microscopy from microscale to nanoscale dimensional analysis. So far, sensitivity to a 3 nm difference in line widths has been demonstrated in the laboratory.


'/>"/>

Contact: Evelyn Brown
evelyn.brown@nist.gov
301-975-5661
National Institute of Standards and Technology (NIST)
Source:Eurekalert  

Related biology technology :

1. Nanoscale carbon materials research wins the 2008 Julius Springer Prize for Applied Physics
2. New nanoscale process created by UCSB scientists will help computers run faster and more efficiently
3. Nanoscale silver: No silver lining?
4. BioNanomatrix Awarded New NIH Grant for Development of Nanoscale Platform for Single-Molecule DNA Mapping and Haplotype Applications
5. Penn researchers demonstrate a flexible, 1-step assembly of nanoscale structures
6. University of Pennsylvania engineers reveal what makes diamonds slippery at the nanoscale
7. A look into the nanoscale
8. Trap and zap: Harnessing the power of light to pattern surfaces on the nanoscale
9. Engineers whip up the first long-lived nanoscale bubbles
10. Physicists discover gold can be magnetic on the nanoscale
11. Surface dislocation nucleation: Strength is but skin deep at the nanoscale, Penn engineers discover
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
Nanoscale dimensioning is fast, cheap with new NIST optical technique
(Date:9/26/2017)... ... ... “The American Academy of Anti-Aging and Preventative Medicine declares War on Dementia,” proclaimed ... Die with a form of Dementia. , The 28,000 Physicians and Scientists of ... potential to slow and reverse Dementia and brain aging. , If you think 1/3 ...
(Date:9/26/2017)... Kent, WA (PRWEB) , ... September 26, 2017 ... ... assembled Pilot Skid membrane filtration systems. , These Pilot Skid Systems are specifically ... processes. They offer more than 200 times the filtration surface available in standard ...
(Date:9/26/2017)... ... 2017 , ... arivis, Inc., a provider of clinical and ... Shield EU-US. This milestone assures clients using arivis Clireo technologies that their data ... arivis clients can more assuredly operate their clinical and regulatory processes within Clireo, ...
(Date:9/25/2017)... ... 25, 2017 , ... eClinical Solutions LLC, an industry-leading provider ... announced today that the elluminate® Data Intelligence Hub has been selected as ... NextGen Technology Innovation Awards . , elluminate is a cloud based ...
Breaking Biology Technology:
(Date:8/23/2017)... Aug. 23, 2017  The general public,s help is being enlisted in ... that live in and on the human body –and are believed to ... The Microbiome Immunity Project ... microbiome, starting with the gut. The project's goal is to help advance ... IBM ...
(Date:8/15/2017)... --  ivWatch LLC , a medical device company focused on improving ... of its ISO 13485 Certification, the global standard for medical device ... (ISO®). ... Monitoring device for the early detection of IV infiltrations. ... "This is an important milestone for ivWatch, as it ...
(Date:7/20/2017)... (NYSE: DAL ) customers now can use fingerprints instead of ... Airport (DCA). ... Delta launches biometrics to board aircraft at Reagan Washington National Airport ... Delta,s biometric boarding pass experience that launched in May ... boarding process to allow eligible Delta SkyMiles Members who are enrolled in ...
Breaking Biology News(10 mins):