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Nanoimprint lithography NSF grant awarded to micro device lab at Stevens
Date:10/7/2010

Dr. Eui-Hyeok Yang, Associate Professor of Mechanical Engineering and Director of the Micro Device Laboratory (MDL) at Stevens Institute of Technology, The Innovation University (TM), will receive funding from the National Science Foundation (NSF) for the acquisition of a Nanoimprint Lithography System (NIL) for the purpose of nanoscience research and education based on low-dimensional materials at Stevens. The Co-PIs of the project are Drs. Besser, Choi, Cappelleri and Strauf. This equipment acquisition is an important step in achieving Dr. Yang's goal of integrating research and education in nanotechnology at the MDL. In addition, nanoimprint lithography will benefit local institutions searching for nearby solutions for nanopatterning. "The system will be an open local resource for researchers," Yang says.

"The NIL system is the latest piece of equipment in completing the fabrication process flow for micro/nano devices at Stevens," Yang says. "The MDL's capabilities for research and education increase significantly with this system."

The grant funds the acquisition of a Nanonex 1000 Nanoimprint Lithography System, a whole-wafer (4-inch) nanoimprinter for thermoplastic resins that has high-resolution (~10 nm) and high-throughput (~60 sec) capabilities. This acquisition will strengthen the exploration of high-throughput nanoscale patterning as a key part of the research projects funded by NSF, DARPA, US Army, AFOSR, and ONR. These inter-disciplinary, high-risk, high-payoff research projects will provide a consistently growing user base and cultivate a multidisciplinary research-intense learning environment in nanotechnology at Stevens along with collaborators in the New York City metropolitan area.

This research capability also supports cross-disciplinary educational initiatives already underway at Stevens. It provides hands-on experience to students in the Nanotechnology Graduate Program and undergraduates alike. One of Yang's under
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Contact: Dr. Eui-Hyeok Yang
eyang@stevens.edu
201-216-5574
Stevens Institute of Technology
Source:Eurekalert

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