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Nano measurement in the third dimension
Date:7/6/2009

ed laser displacement sensors of the company SIOS Messtechnik GmbH. The new functionalities given by the measuring probe and the software extend the scanning probe microscope to a metrological micro/nano coordinate measuring machine (CMM) which also allows 3D measurements conforming to standards to be performed on micro and nano structures.

International intercomparisons on step-height standards and lattice structures have shown that the measuring system is worldwide one of the most precise of its kind. For step heights, measurement uncertainties in the subnanometer range - and for measurements of the mean structure spacing on extensive lattice standards even in the range of 10 picometers - have been achieved and confirmed in comparison with optical diffraction measurements.

The new measuring instrument is available for dimensional precision measurements with nm resolution on 3D micro and nano structures such as micro gears, micro balls, hardness indenters and nano lattice standards as well as for comparisons of measures; moreover, it serves as a platform for research and development tasks. It is an important link between nano, micro and macro coordinate metrology. (ptb/if)


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Contact: Dr. Gaoliang Dai
Gaoliang.Dai@ptb.de
49-531-592-5127
Physikalisch-Technische Bundesanstalt (PTB)
Source:Eurekalert

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