Date:9/14/2007

completely processed well below their order-disorder transition temperature. Properly controlled, the lower-temperature processing not only works with BCPs for which hot-zone annealing is impractical, but, as the NIST experiments showed, also repeatedly produces a highly ordered thin film in a matter of minutes. NIST researchers also discovered that the alignment of the cylinders was controlled by the cold zone annealing conditions. Because it is simple, yields consistent product quality and has virtually no limitations on sample dimensions, the NIST method is being evaluated by microelectronic companies to fabricate highly ordered sub 30 nm features.

The next step, the NIST researchers say, is to better understand the fundamental processes that make the cold zone annealing system work so well and refine the measurements needed to evaluate its performance.

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Contact: Michael E. Newman michael.newman@nist.gov 301-975-3025 National Institute of Standards and Technology (NIST) Source:Eurekalert

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