Navigation Links
Making a good impression: Nanoimprint lithography tests at NIST
Date:4/29/2008

In what should be good news for integrated circuit manufacturers, recent studies by the National Institute of Standards and Technology (NIST) have helped resolve two important questions about an emerging microcircuit manufacturing technology called nanoimprint lithographyyes, it can accurately stamp delicate insulating structures on advanced microchips, and, no, it doesnt damage them, in fact it makes them better.

An emerging manufacturing technique, nanoimprint lithography (NIL) is basically an embossing process. A stamp with a nanoscale pattern in its surface is pressed into a soft film on the surface of a semiconductor wafer. The film is hardened, usually by heating or exposure to ultraviolet light, and the film retains the impressed pattern from the stamp. The process is astonishingly accurate. NIL has been used to create features as small as ten nanometers across with relatively complex shapes.

NIL is being eyed in particular for building the complexly patterned insulating layers sandwiched between layers of logic devices in future generations of integrated circuits. State-of-the-art semiconductors contain over a billion transistors, packed together into a footprint of silicon that is no bigger than a few square centimeters. Several miles of nanoscale copper wiring are required to connect the devices, and these wires must be separated by a highly efficient insulator. One candidate is a porous glassy material called SOG* that can be applied as a thin fluid film. When heated, SOG turns into a thin glass film laced with nanometer pores that enhance the electrical insulation. But SOG is relatively delicate, and the conventional photoresist etching process used to cut trenches for the wiring can compromise it. NIL, on the other hand, might be able to pattern SOG layers with wiring trenches and eliminate several time-consuming and expensive photolithography steps if it could pattern the film accurately and do so without destroying the delicate nanopore lacework.

In a paper published last fall,** NIST materials scientists addressed the first question. Using sensitive X-ray measurements they demonstrated that NIL could be used on a functional SOG material to transfer patterns with details finer than 100 nanometers with minimal distortion due to the processing. In a new paper this month,*** they extend this work to study the effect of the embossing process on the nanopore structure in the glass. Using a combination of techniques to measure the distribution of nanopores in the insulator material, they found that the NIL embossing process actually has a beneficial effectit increases the population of small pores, which improve performance, reduces the population of larger pores that can cause problems and creates a thin, dense protective skin across the surface of the material. All of these effects are highly attractive for minimizing short circuits in semiconductor devices.

Taken together, the two papers suggest that nanoimprint lithography can produce superior nanoporous insulator layers in advanced semiconductor devices with significantly fewerand easierprocessing steps than conventional lithography.


'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)
Source:Eurekalert  

Related biology technology :

1. Secure Symbology: Making New Jersey Proud While Saving Lives
2. Thomson Scientific Publishes Who Is Making The Biggest Splash? - A Quarterly Review of Scientific Literature on Drugs and Therapies From April - June 2007
3. Free CME-certified Webcast: Making Your Case: Up-to-date Answers for Developing Trends in PCI
4. Creating the Bionic Woman: Making Nerves Spring Back to Life
5. Making gas out of crude oil
6. DuPont Chief Science & Technology Officer Offers Perspectives on Science and Global Policymaking at Davos World Economic Forum
7. Carrington Subsidiary DelSite Starts Making Test Batches of First Bird Flu Vaccine Offering Needle-free Self-Administration
8. New paper reveals nanoscale details of photolithography process
9. BioReliance Corporation Launches iNet(TM) for Online Results Tracking of Biological Safety Tests
10. EpiStem Successfully Complete First Year of Mucositis Tests for NIH Biodefence Programme
11. Researchers underscore limitations of genetic ancestry tests
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
Making a good impression: Nanoimprint lithography tests at NIST
(Date:2/11/2016)... and GERMANTOWN, Maryland , ... Frankfurt Prime Standard: QIA) today announced the introduction of ... gene expression profiling, expanding QIAGEN,s portfolio of Sample to ... researchers to select from over 20,000 human genes and ... between genes, cellular phenotypes and disease processes. --> ...
(Date:2/11/2016)... , Feb. 11, 2016  Spectra BioPharma Selling ... (CSO) that provides biopharma companies the experience, expertise, ... and deploy outsourced sales teams. Created in concert ... addresses both the strategic and tactical needs of ... sales solutions through both personal and non-personal promotion. ...
(Date:2/11/2016)... ... February 11, 2016 , ... ... cutting-edge information focused on the development and manufacture of biopharmaceuticals and therapeutics, ... sponsor of the 2016 BioProcess International Awards – Recognizing Excellence in the ...
(Date:2/11/2016)... , February 11, 2016 ... ("PositiveID" or "Company") (OTCQB: PSID), a life sciences ... that its Thermomedics subsidiary, which markets the Caregiver® ... growth plan in January 2016, including entering into ... sequential monthly sales growth, and establishing several near-term ...
Breaking Biology Technology:
(Date:1/13/2016)... , January 13, 2016 /PRNewswire/ ... announced the addition of the  "India ... Estimation & Forecast (2015-2020)"  report ... http://www.researchandmarkets.com/research/7h6hnn/india_biometrics ) has announced the addition ... Identification Market - Estimation & Forecast ...
(Date:1/11/2016)... , Jan. 11, 2016  higi, the leading ... 10,000 retail locations, web and mobile, today announced ... million from existing investors. --> ... devoted to further innovate higi,s health platform – ... web portal – including expanding services and programs ...
(Date:1/8/2016)... January 8, 2016 NXTD ), ... WorldVentures ® , a privately held leading direct seller ... Inc. 5000 fastest-growing company announced that on December ... $2 million in Nxt-ID to develop a proprietary new ... Wocket ® , a unique smart wallet that serves ...
Breaking Biology News(10 mins):