Navigation Links
Making a good impression: Nanoimprint lithography tests at NIST
Date:4/29/2008

In what should be good news for integrated circuit manufacturers, recent studies by the National Institute of Standards and Technology (NIST) have helped resolve two important questions about an emerging microcircuit manufacturing technology called nanoimprint lithographyyes, it can accurately stamp delicate insulating structures on advanced microchips, and, no, it doesnt damage them, in fact it makes them better.

An emerging manufacturing technique, nanoimprint lithography (NIL) is basically an embossing process. A stamp with a nanoscale pattern in its surface is pressed into a soft film on the surface of a semiconductor wafer. The film is hardened, usually by heating or exposure to ultraviolet light, and the film retains the impressed pattern from the stamp. The process is astonishingly accurate. NIL has been used to create features as small as ten nanometers across with relatively complex shapes.

NIL is being eyed in particular for building the complexly patterned insulating layers sandwiched between layers of logic devices in future generations of integrated circuits. State-of-the-art semiconductors contain over a billion transistors, packed together into a footprint of silicon that is no bigger than a few square centimeters. Several miles of nanoscale copper wiring are required to connect the devices, and these wires must be separated by a highly efficient insulator. One candidate is a porous glassy material called SOG* that can be applied as a thin fluid film. When heated, SOG turns into a thin glass film laced with nanometer pores that enhance the electrical insulation. But SOG is relatively delicate, and the conventional photoresist etching process used to cut trenches for the wiring can compromise it. NIL, on the other hand, might be able to pattern SOG layers with wiring trenches and eliminate several time-consuming and expensive photolithography steps if it could pattern the film accurately and do so without destroying the del
'/>"/>

Contact: Michael Baum
michael.baum@nist.gov
301-975-2763
National Institute of Standards and Technology (NIST)
Source:Eurekalert  

1

GOOD

Page: 1 2

Related biology technology :

1. Secure Symbology: Making New Jersey Proud While Saving Lives
2. Thomson Scientific Publishes Who Is Making The Biggest Splash? - A Quarterly Review of Scientific Literature on Drugs and Therapies From April - June 2007
3. Free CME-certified Webcast: Making Your Case: Up-to-date Answers for Developing Trends in PCI
4. Creating the Bionic Woman: Making Nerves Spring Back to Life
5. Making gas out of crude oil
6. DuPont Chief Science & Technology Officer Offers Perspectives on Science and Global Policymaking at Davos World Economic Forum
7. Carrington Subsidiary DelSite Starts Making Test Batches of First Bird Flu Vaccine Offering Needle-free Self-Administration
8. New paper reveals nanoscale details of photolithography process
9. BioReliance Corporation Launches iNet(TM) for Online Results Tracking of Biological Safety Tests
10. EpiStem Successfully Complete First Year of Mucositis Tests for NIH Biodefence Programme
11. Researchers underscore limitations of genetic ancestry tests
Post Your Comments:
*Name:
*Comment:
*Email:
Related Image:
Making a good impression: Nanoimprint lithography tests at NIST
Making a good impression: Nanoimprint lithography tests at NIST
(Date:12/14/2009)... 14 , - Results ... With Rheumatoid Arthritis in Seven Major Industrialized Countries , , ... rheumatoid arthritis say their disease, ... - Women living with rheumatoid arthritis find shopping for gifts, ... and wrapping presents most, difficult ...
(Date:12/11/2009)... MA (12/11/2009) Boston College researchers have observed the ... first time and successfully harvested the elusive charges using ... solar power efficiency, the authors report in the current ... When light is captured in solar cells, it generates ... in order to snare these charges, the electrons must ...
(Date:12/11/2009)... Biotech Inc. (TSX:ONC, NASDAQ: ONCY ) ("Oncolytics" or ... Alan Warrander to the role of Senior Vice ... Warrander will be responsible for the execution of ... Brad Thompson, President and CEO of Oncolytics. "Having ... Phase 3 trial examining REOLYSIN in combination with ...
(Date:12/10/2009)... of the National Institutes of Health (NIH), awarded a $2.18 ... of a non-invasive, passive diffusion-based treatment for severe, non-infectious uveitis. ... ... City, UT (PRWEB) December 10, 2009 -- The National Eye ... (NIH), awarded a $2.18 million grant to Aciont Inc. to ...
Breaking Biology Technology:Rheumatoid Arthritis Patients Want Pain-Free Days at Christmas 2Rheumatoid Arthritis Patients Want Pain-Free Days at Christmas 3Rheumatoid Arthritis Patients Want Pain-Free Days at Christmas 4Elusive 'hot' electrons captured in ultra-thin solar cells 2Oncolytics Biotech(R) Inc. Appoints Senior Vice President, Global Licensing and Business Development 2Oncolytics Biotech(R) Inc. Appoints Senior Vice President, Global Licensing and Business Development 3NEI Awards a Two-Year $2.18 Million SBIR Grant to Aciont 2NEI Awards a Two-Year $2.18 Million SBIR Grant to Aciont 3
... Introduction , ... analytical evaluation of tooth decay is required in any study of the ... of which dental products are most effective in slowing or arresting the ... introduce interference that would mask fluorescence indicators. Thus, a SPEX ...
... Introduction , ... a new generation of graphic displays for communications and high-definition television sets. For ... critical characteristics are the lifetimes and wavelengths of their emissions. , ... Results , Because the lifetimes and wavelengths ...
... highly-concentrated, opaque, or solid samples such as ... films, or phosphors, front-face fluorescence detection offers ... measurements. Highly concentrated and opaque liquids typically ... of the beam. When measuring fluorescence at ...
Other Biology Technology:Characterization of tooth decay 2
(Date:12/14/2009)... or for Tasmanian devils biting each other ... the dinosaurs to extinction through the transmission of a ... Biology, highlights the ,paleobiological detective work, of David Varricchio ... to deduce that a protozoan parasite was to blame ... fossils. , The parasite,s modern-day equivalent, which infects birds, ...
(Date:12/14/2009)... use as a defining feature of humans. That,s until examples ... birds and an array of other mammals. Now, a report ... a Cell Press publication, adds an octopus to the growing ... manages a behavioral trick that the researchers call stilt walking. ... coconut shell "bowls," makes its eight arms rigid, and raises ...
(Date:12/13/2009)... a question about how a popular class of ... that reveal previously hidden components of chemical communication ... hallucinations characterize the illness, people with schizophrenia also ... a particular order, difficulties that interfere with their ... said Lee Schroeder, a student in the medical ...
Breaking Biology News(10 mins):Tool use in an invertebrate: The coconut-carrying octopus 2New biosensors reveal workings of anti-psychotic drugs in the living brain 2Swine Flu May Bring Surge in Hospitalizations 59170 1Swine Flu May Bring Surge in Hospitalizations 59170 2Swine Flu May Bring Surge in Hospitalizations 59170 3The latest on H1N1 flu from the Harvard Health Letter 59167 1The latest on H1N1 flu from the Harvard Health Letter 59167 2The latest on H1N1 flu from the Harvard Health Letter 59167 3Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 1Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 2Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 3Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 4Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 5Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 6Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 7Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 8Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 9Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 10Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 11Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 12Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 13Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 14Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 15Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 16Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 17Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 18Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 19Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 20Reportlinker Adds Boosting Immunity Through Digestion 3A The Relation Among Probiotics Prebiotics and Digestive Enzymes 59163 21
... and seas on Saturn,s moon Titan taken by the Cassini ... comprised from seven Titan fly-bys over the last year and ... and seas, at least one of them larger than Lake ... Approximately 60% of Titan,s north polar region, above 60 north, ...
... discovered that the nuclei of human stem cells are ... easier for stem cells to migrate through the body ... human genes in the correct nuclear sector for proper ... glass tubes under controlled pressures and visualized the shear ...
... a reality today, but how can we find out about ... a full record of the Earths climate for several hundred ... that can be taken to the lab for analysis. Incredibly, ... Antarctic regions, and a European Science Foundation programme has a ...
Other Biology News:Cassini's new view of land of lakes and seas 2Stem cell nuclei are soft 'hard drives,' Penn study finds 2European lead in reading past climates from ice cores 2European lead in reading past climates from ice cores 3
... ISO 9001:2000 Certified USDA Research Registered ... SOP's Training AALAS Certified Technicians ... Procedures GLP Documentation Upon Request Focus ... point for all your custom immunology service ...
Applications: Western blotting ...
... by collecting data from any RS232 based ... is extremely easy to use and will ... An excellent solution for collecting data ... gauges, digital calipers, bar code readers, etc. ...
One unit is equal to 10Kb (insert DNA + vector). The final cost will increase or decrease according to the final assembled genome size. The price does not include genome annotation....
Biology Products: