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Industry Leaders Drive SPIE Photomask Technology Conference
Date:9/20/2013

has manufacturing operations in Europe, the U.S., Taiwan and Korea, with expertise from IC to FPD mask-making in all geometries.

Tadahiro Takigawa of ASML Japan was awarded the 2013 BACUS Prize in recognition of his contributions toward development and commercialization of high keV vector scanned beam photomask lithography tools. Close to half of all masks are now made with 50 keV VSB technology developed or influenced by Takigawa, first at Toshiba Machine Corp. and subsequently at NuFlare.

Outstanding students were recognized as well.

Bei Yu and Jhih-Rong Gao, PhD students at the University of Texas at Austin, received the 2013 BACUS Scholarship. They are investigating multiple patterning, DFM, E-beam lithography, RET, layout planning and networks-on-chip, and have produced 30 papers since 2008, on layout fracturing, self-aligned patterning and floor planning techniques to help extend device scaling to 10 nm and beyond.

Best Poster Awards went to:

  •      First Place: Natalia Davydova, ASML Netherlands, et al., for “Impact of an etched EUV mask black border on imaging and overlay, part II”
  •     Second Place: G. Ning, GlobalFoundries, et al., for “Alternative material to migate chrome degradation on high volume ArF layers”
  •     Third Place: Songbae Moon, Samsung Electronics Co., et al., for “A study on the chromium surface damage in the structure of a silicon oxynitride hard mask on the chromium surface of PSM blank”

Support for the meeting was provided by companies including Hoya, Applied Materials, Taiwan Mask Corp., JEOL, Zeiss, Mentor Graphics, Rave, NuFlare, DNP and Synopsys.

Proceedings are being published online in the SPIE Digital Library as manuscripts are approved.
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