Navigation Links
Industry Leaders Drive SPIE Photomask Technology Conference
Date:9/20/2013

Monterey, California, USA (PRWEB) September 19, 2013

SPIE Photomask Technology won praise from attendees for the strong technical program at the 33rd annual event this year in Monterey, 10-12 September. Sponsored by SPIE, the international society for optics and photonics, the event is the industry’s largest meeting of semiconductor mask makers. Approximately 440 international attendees were there to exchange the latest progress on the industry’s biggest challenges such as EUV, OPC/simulation, contamination and durability.

Symposium Chair Thomas Faure (IBM Corp.) and Co-Chair Paul Ackmann (GlobalFoundries) were among participants who said they were very pleased with the quality of the talks. Sessions covered current technical issues, emerging technologies and future trends, with reports on research findings helping to inform discussions on how to meet the emerging technical challenges facing the industry.

Among technical highlights were a keynote talk by Michael Mayberry, Corporate VP of the Technology and Manufacturing Group and Director of Components Research at Intel Corp., on materials, functional compatibility, performance-power metrics and cost issues needing to be solved to meet needs of the future; and a panel discussion on "Big Bad Glass: Will It Return?" that considered whether changes in the wafer landscape and EUV require the move to larger glass, what the cost of not doing so would be, and whether another technique would support the technology.

The community honored two of its members for important innovations.

Constantine (Deno) Macricostas was presented with the Photomask 2013 Lifetime Achievement award. Macricostas, who founded Photronics in 1969, cited for his dedication to customer service, strategic acquisitions and partnerships. Today, Photronics has manufacturing operations in Europe, the U.S., Taiwan and Korea, with expertise from IC to FPD mask-making in all geometries.

Tadahiro Takigawa of ASML Japan was awarded the 2013 BACUS Prize in recognition of his contributions toward development and commercialization of high keV vector scanned beam photomask lithography tools. Close to half of all masks are now made with 50 keV VSB technology developed or influenced by Takigawa, first at Toshiba Machine Corp. and subsequently at NuFlare.

Outstanding students were recognized as well.

Bei Yu and Jhih-Rong Gao, PhD students at the University of Texas at Austin, received the 2013 BACUS Scholarship. They are investigating multiple patterning, DFM, E-beam lithography, RET, layout planning and networks-on-chip, and have produced 30 papers since 2008, on layout fracturing, self-aligned patterning and floor planning techniques to help extend device scaling to 10 nm and beyond.

Best Poster Awards went to:

  •      First Place: Natalia Davydova, ASML Netherlands, et al., for “Impact of an etched EUV mask black border on imaging and overlay, part II”
  •     Second Place: G. Ning, GlobalFoundries, et al., for “Alternative material to migate chrome degradation on high volume ArF layers”
  •     Third Place: Songbae Moon, Samsung Electronics Co., et al., for “A study on the chromium surface damage in the structure of a silicon oxynitride hard mask on the chromium surface of PSM blank”

Support for the meeting was provided by companies including Hoya, Applied Materials, Taiwan Mask Corp., JEOL, Zeiss, Mentor Graphics, Rave, NuFlare, DNP and Synopsys.

Proceedings are being published online in the SPIE Digital Library as manuscripts are approved. For the first time at an SPIE event, meeting attendees have free 90-day access to conference proceedings, beginning during the event, in addition to receiving a full-conference proceedings on CD when all submissions are in.

In a related new SPIE Newsroom video interview, industry veteran Brian Grenon, business unit manager for the Advanced Technical Instruments division of RAVE N.P., talks about the effect of costs driving a more intense focus on solving issues, citing source power and mask infrastructure as key challenges.

About SPIE

SPIE is the international society for optics and photonics, a not-for-profit organization founded in 1955 to advance light-based technologies. The Society serves more than 235,000 constituents from approximately 155 countries, offering conferences, continuing education, books, journals, and a digital library in support of interdisciplinary information exchange, professional networking, and patent precedent. SPIE provided over $3.2 million in support of education and outreach programs in 2012.

Read the full story at http://www.prweb.com/releases/2013/9/prweb11144612.htm.


'/>"/>
Source: PRWeb
Copyright©2012 Vocus, Inc.
All rights reserved

Related biology technology :

1. BioConvergence®, Contract Manufacturing Organization for the Life Sciences Industry, Announces New Board of Directors
2. Rising Interest in Molecular Biology Research Drives Demand for qPCR and dPCR Instrumentation, According to a Soon to be Released Report by Global Industry Analysts, Inc.
3. Global Forensic Technologies And Services Industry
4. Global Sedimentation and Centrifugation Market 2012 - 2016: Worldwide Industry Latest Market Share, Growth, Size, Trends, Strategy and Forecast Research Report
5. Ambit Announces Participation At The BioCentury NewsMakers in the Biotech Industry Conference
6. Green Dot Holdings LLC CEO, Mark Remmert, Joins Industry Thought Leaders to Discuss Holistic Sustainable Design at A Better World by Design Conference
7. Increasing Need for Supply of High-Quality Water Drives Growth in the Water Analysis Instrumentation Market, According to New Report by Global Industry Analysts, Inc.
8. Global Industry Analysts, Inc. Announces the Launch of a Major Research Program Analysing the Global Market for Circulating Tumor Cells and Cancer Stem Cells
9. MEI Pharma to Present at BioCenturys NewsMakers in the Biotech Industry Conference
10. New BioNews Texas Website Gives Industry Direct Access to Texas Biotech Sector
11. MarketResearchReports.Biz: China Orthopedic Instrument Industry Report, 2013 - 2015 - New Industry Report
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:10/12/2017)... SARASOTA, FL (PRWEB) , ... ... ... Inc. (RPS®) today announces publication of a United States multicenter, prospective clinical ... single use, disposable, point-of-care diagnostic test capable of identifying clinically significant acute ...
(Date:10/11/2017)... (PRWEB) , ... October 11, 2017 , ... ... Foundation President Andi Purple announced Dr. Suneel I. Sheikh, the co-founder, CEO ... ASTER Labs ), Inc. has been selected for membership in ARCS Alumni ...
(Date:10/11/2017)... ... October 11, 2017 , ... Proscia Inc ., ... a Webinar titled, “Pathology is going digital. Is your lab ready?” with Dr. ... best practices and how Proscia improves lab economics and realizes an increase in ...
(Date:10/11/2017)... TX (PRWEB) , ... October 11, 2017 , ... ... August compared the implantation and pregnancy rates in frozen and fresh in ... contribution of progesterone and maternal age to IVF success. , After comparing the ...
Breaking Biology Technology:
(Date:4/18/2017)... 18, 2017  Socionext Inc., a global expert in SoC-based imaging ... server, the M820, which features the company,s hybrid codec technology. A ... Tera Probe, Inc., will be showcased during the upcoming Medtec Japan ... at the Las Vegas Convention Center April ... Click here for ...
(Date:4/13/2017)... , April 13, 2017 According to a new ... Authentication, Identity Analytics, Identity Administration, and Authorization), Service, Authentication Type, Deployment Mode, ... IAM Market is expected to grow from USD 14.30 Billion in 2017 ... (CAGR) of 17.3%. ... MarketsandMarkets Logo ...
(Date:4/11/2017)... BROOKLYN, N.Y. , April 11, 2017 /PRNewswire-USNewswire/ ... identical fingerprints, but researchers at the New York ... University College of Engineering have found that partial ... fingerprint-based security systems used in mobile phones and ... previously thought. The vulnerability lies in ...
Breaking Biology News(10 mins):