Navigation Links
Industry Leaders Drive SPIE Photomask Technology Conference
Date:9/20/2013

Monterey, California, USA (PRWEB) September 19, 2013

SPIE Photomask Technology won praise from attendees for the strong technical program at the 33rd annual event this year in Monterey, 10-12 September. Sponsored by SPIE, the international society for optics and photonics, the event is the industry’s largest meeting of semiconductor mask makers. Approximately 440 international attendees were there to exchange the latest progress on the industry’s biggest challenges such as EUV, OPC/simulation, contamination and durability.

Symposium Chair Thomas Faure (IBM Corp.) and Co-Chair Paul Ackmann (GlobalFoundries) were among participants who said they were very pleased with the quality of the talks. Sessions covered current technical issues, emerging technologies and future trends, with reports on research findings helping to inform discussions on how to meet the emerging technical challenges facing the industry.

Among technical highlights were a keynote talk by Michael Mayberry, Corporate VP of the Technology and Manufacturing Group and Director of Components Research at Intel Corp., on materials, functional compatibility, performance-power metrics and cost issues needing to be solved to meet needs of the future; and a panel discussion on "Big Bad Glass: Will It Return?" that considered whether changes in the wafer landscape and EUV require the move to larger glass, what the cost of not doing so would be, and whether another technique would support the technology.

The community honored two of its members for important innovations.

Constantine (Deno) Macricostas was presented with the Photomask 2013 Lifetime Achievement award. Macricostas, who founded Photronics in 1969, cited for his dedication to customer service, strategic acquisitions and partnerships. Today, Photronics has manufacturing operations in Europe, the U.S., Taiwan and Korea, with expertise from IC to FPD mask-making in all geometries.

Tadahiro Takigawa of ASML Japan was awarded the 2013 BACUS Prize in recognition of his contributions toward development and commercialization of high keV vector scanned beam photomask lithography tools. Close to half of all masks are now made with 50 keV VSB technology developed or influenced by Takigawa, first at Toshiba Machine Corp. and subsequently at NuFlare.

Outstanding students were recognized as well.

Bei Yu and Jhih-Rong Gao, PhD students at the University of Texas at Austin, received the 2013 BACUS Scholarship. They are investigating multiple patterning, DFM, E-beam lithography, RET, layout planning and networks-on-chip, and have produced 30 papers since 2008, on layout fracturing, self-aligned patterning and floor planning techniques to help extend device scaling to 10 nm and beyond.

Best Poster Awards went to:

  •      First Place: Natalia Davydova, ASML Netherlands, et al., for “Impact of an etched EUV mask black border on imaging and overlay, part II”
  •     Second Place: G. Ning, GlobalFoundries, et al., for “Alternative material to migate chrome degradation on high volume ArF layers”
  •     Third Place: Songbae Moon, Samsung Electronics Co., et al., for “A study on the chromium surface damage in the structure of a silicon oxynitride hard mask on the chromium surface of PSM blank”

Support for the meeting was provided by companies including Hoya, Applied Materials, Taiwan Mask Corp., JEOL, Zeiss, Mentor Graphics, Rave, NuFlare, DNP and Synopsys.

Proceedings are being published online in the SPIE Digital Library as manuscripts are approved. For the first time at an SPIE event, meeting attendees have free 90-day access to conference proceedings, beginning during the event, in addition to receiving a full-conference proceedings on CD when all submissions are in.

In a related new SPIE Newsroom video interview, industry veteran Brian Grenon, business unit manager for the Advanced Technical Instruments division of RAVE N.P., talks about the effect of costs driving a more intense focus on solving issues, citing source power and mask infrastructure as key challenges.

About SPIE

SPIE is the international society for optics and photonics, a not-for-profit organization founded in 1955 to advance light-based technologies. The Society serves more than 235,000 constituents from approximately 155 countries, offering conferences, continuing education, books, journals, and a digital library in support of interdisciplinary information exchange, professional networking, and patent precedent. SPIE provided over $3.2 million in support of education and outreach programs in 2012.

Read the full story at http://www.prweb.com/releases/2013/9/prweb11144612.htm.


'/>"/>
Source: PRWeb
Copyright©2012 Vocus, Inc.
All rights reserved

Related biology technology :

1. BioConvergence®, Contract Manufacturing Organization for the Life Sciences Industry, Announces New Board of Directors
2. Rising Interest in Molecular Biology Research Drives Demand for qPCR and dPCR Instrumentation, According to a Soon to be Released Report by Global Industry Analysts, Inc.
3. Global Forensic Technologies And Services Industry
4. Global Sedimentation and Centrifugation Market 2012 - 2016: Worldwide Industry Latest Market Share, Growth, Size, Trends, Strategy and Forecast Research Report
5. Ambit Announces Participation At The BioCentury NewsMakers in the Biotech Industry Conference
6. Green Dot Holdings LLC CEO, Mark Remmert, Joins Industry Thought Leaders to Discuss Holistic Sustainable Design at A Better World by Design Conference
7. Increasing Need for Supply of High-Quality Water Drives Growth in the Water Analysis Instrumentation Market, According to New Report by Global Industry Analysts, Inc.
8. Global Industry Analysts, Inc. Announces the Launch of a Major Research Program Analysing the Global Market for Circulating Tumor Cells and Cancer Stem Cells
9. MEI Pharma to Present at BioCenturys NewsMakers in the Biotech Industry Conference
10. New BioNews Texas Website Gives Industry Direct Access to Texas Biotech Sector
11. MarketResearchReports.Biz: China Orthopedic Instrument Industry Report, 2013 - 2015 - New Industry Report
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:6/23/2016)... A person commits a crime, and the detective ... the criminal down. An outbreak of foodborne illness ... (FDA) uses DNA evidence to track down the bacteria that ... It,s not. The FDA has increasingly used a complex, cutting-edge ... illnesses. Put as simply as possible, whole genome sequencing is ...
(Date:6/23/2016)... MONICA, Calif. , June 23, 2016  The Prostate Cancer Foundation ... pioneer increasingly precise treatments and faster cures for prostate cancer. Members of the ... institutions across 15 countries. Read More About the Class ... ... ...
(Date:6/23/2016)... ... 2016 , ... Supplyframe, the Industry Network for electronics hardware ... . Located in Pasadena, Calif., the Design Lab’s mission is to bring together ... built and brought to market. , The Design Lab is Supplyframe’s physical representation ...
(Date:6/23/2016)... LOUISVILLE, Ky. , June 23, 2016 /PRNewswire/ ... from two Phase 1 clinical trials of its ... double-blind, placebo-controlled, single and multiple ascending dose studies ... and pharmacodynamics (PD) of subcutaneous injection in healthy ... APL-2 subcutaneously (SC) either as a single dose ...
Breaking Biology Technology:
(Date:6/7/2016)... , June 7, 2016  Syngrafii Inc. and ... business relationship that includes integrating Syngrafii,s patented LongPen™ ... project. This collaboration will result in greater convenience ... credit union, while maintaining existing document workflow and ... ...
(Date:6/1/2016)... YORK , June 1, 2016 ... Technology in Election Administration and Criminal Identification to Boost ... to a recently released TechSci Research report, " Global ... By Region, Competition Forecast and Opportunities, 2011 - 2021", ... 24.8 billion by 2021, on account of growing security ...
(Date:5/9/2016)... 2016 Elevay is currently known ... freedom for high net worth professionals seeking travel for ... connected world, there is still no substitute for a ... sealing your deal with a firm handshake. This is ... advantage of citizenship via investment programs like those offered ...
Breaking Biology News(10 mins):