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IBM and Imago find a crucial difficulty in semiconductor device scaling
Date:9/6/2007

n microscopy (TEM) to correlate indirectly the presence of dopant atoms with the evolution of defects, and detailed models have been proposed to account for these experimental correlations. However, the atom probe study published in Science reports, for the first time, the location of individual dopant atoms. Said Imago Senior Director of Applications and co-author David Larson, The Sept. 7 Science article is the most recent in a series of significant scientific advances reported by Imagos customers. Added Dr. Larson, In addition to producing breakthrough published scientific results, the Imago atom probe is also being applied to various industrial problems. These proprietary results are advancing scientific knowledge, enabling the development of new products, and improving time to market for our customers.


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Contact: Jason Schneir
jschneir@imago.com
608-274-6880 x239
Imago Scientific Instruments
Source:Eurekalert

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