Navigation Links
IBM and Imago find a crucial difficulty in semiconductor device scaling
Date:9/6/2007

In 1959, Nobel Prize winner Richard Feynman presented a talk entitled There's Plenty of Room at the Bottom. Feynman concluded that there was no physical reason why humans couldn't manipulate atoms. However, if atomic manipulation is achieved the question of observing the new atom positions remains. How do you know what you have done"

As reported in the Sept. 7, 2007 issue of Science, IBM and Imago have taken a seminal step along the path to achieving Dr. Feynmans vision by observing, for the first time, distributions of individual dopant atoms in semiconductor devices. Atom probe tomography was used to quantify the location and elemental identity of the atoms proximate to defects in silicon. The dopants were implanted into the silicon uniformly and it was always hoped that the distribution of dopant atoms would be uniform. However, the IBM and Imago researchers found that clusters (more properly Cottrell atmospheres) of dopant atoms form around defects after ion implantation and annealing. Furthermore, these atmospheres persist in surrounding dislocation loops even after considerable thermal treatment creating dopant fluctuations that may ultimately limit the scalability of semiconductor devices.

This is the first time that unambiguous quantitative 3D information regarding the precise location of individual dopant atoms relative to defects has been available said study co-author and Imago CEO Tom Kelly. The ability of the Imago LEAP 3000X Si laser assisted atom probe to make this measurement is the fruition of many years of instrumentation and applications development. We now have a powerful new way to probe the atomic positions of dopants in a semiconductor device. This is a critical tool for scientists seeking to answer Professor Feynmans challenge to manipulate matter at the atomic level and hence enable nanotechnology.

Previously, researchers have used secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM) to correlate indirectly the presence of dopant atoms with the evolution of defects, and detailed models have been proposed to account for these experimental correlations. However, the atom probe study published in Science reports, for the first time, the location of individual dopant atoms. Said Imago Senior Director of Applications and co-author David Larson, The Sept. 7 Science article is the most recent in a series of significant scientific advances reported by Imagos customers. Added Dr. Larson, In addition to producing breakthrough published scientific results, the Imago atom probe is also being applied to various industrial problems. These proprietary results are advancing scientific knowledge, enabling the development of new products, and improving time to market for our customers.


'/>"/>
Contact: Jason Schneir
jschneir@imago.com
608-274-6880 x239
Imago Scientific Instruments
Source:Eurekalert

Related biology technology :

1. Imago sells microscope to Iowa State
2. Imago upgrades atom-probe microscope
3. Imago earns more acclaim for microscope
4. Northwestern adds to its Imago microscope
5. Investors commit $3.4 million to Imago
6. Imago acquires synergistic British firm
7. Imago microscope leads to Northwestern research advance
8. Tech Digest: Imago; RedPrairie
9. UW-Madison helps Imago carry out its big vision for seeing small
10. Japanese institute installs Imago system
11. Imago provides atomic probe to Australian lab
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:4/29/2016)... ... 29, 2016 , ... Summit for Stem Cell has received a $250,000 grant ... stem cell therapy for the treatment of Parkinson’s disease. The Summit research project is ... Scripps Research Institute in San Diego, CA. , The aim of of ...
(Date:4/28/2016)... Hill, Conn. (PRWEB) , ... April 28, 2016 ... ... of financing and ongoing support for Connecticut's innovative, growing companies, today announced the ... digital health and financial technology (fintech) companies. , “VentureClash looks to ...
(Date:4/27/2016)... ... 2016 , ... Shimadzu Scientific Instruments (SSI) will be showcasing ... Conference and Expo. Shimadzu’s high-performance instruments enable laboratories to test cannabis products for ... stop by booth 1021 to learn how Shimadzu’s instruments can help improve QA/QC ...
(Date:4/27/2016)... ... 27, 2016 , ... The Board of Directors of Biohaven ... Tilton as Chief Commercial Officer.  Mr. Tilton joined Biohaven from Alexion Pharmaceuticals, Inc. ... responsible for the commercialization of multiple orphan drug indications. Mr. Tilton has ...
Breaking Biology Technology:
(Date:4/26/2016)... LONDON , April 26, 2016 ... EdgeVerve Systems, a product subsidiary of Infosys (NYSE: ... a partnership to integrate the Onegini mobile security ... (Logo: http://photos.prnewswire.com/prnh/20151104/283829LOGO ) The ... enhanced security to access and transact across channels. ...
(Date:4/14/2016)... Israel , April 14, 2016 ... Authentication and Malware Detection, today announced the appointment of ... assumed the new role. Goldwerger,s leadership appointment ... on the heels of the deployment of its platform ... BioCatch,s behavioral biometric technology, which discerns unique cognitive and ...
(Date:3/23/2016)... March 23, 2016 ... Sicherheit Gesichts- und Stimmerkennung mit Passwörtern ... (NASDAQ: MESG ), ein führender Anbieter ... Unternehmen mit SpeechPro zusammenarbeitet, um erstmals dessen ... wird die Möglichkeit angeboten, im Rahmen mobiler ...
Breaking Biology News(10 mins):