Navigation Links
IBM and Imago find a crucial difficulty in semiconductor device scaling
Date:9/6/2007

In 1959, Nobel Prize winner Richard Feynman presented a talk entitled There's Plenty of Room at the Bottom. Feynman concluded that there was no physical reason why humans couldn't manipulate atoms. However, if atomic manipulation is achieved the question of observing the new atom positions remains. How do you know what you have done"

As reported in the Sept. 7, 2007 issue of Science, IBM and Imago have taken a seminal step along the path to achieving Dr. Feynmans vision by observing, for the first time, distributions of individual dopant atoms in semiconductor devices. Atom probe tomography was used to quantify the location and elemental identity of the atoms proximate to defects in silicon. The dopants were implanted into the silicon uniformly and it was always hoped that the distribution of dopant atoms would be uniform. However, the IBM and Imago researchers found that clusters (more properly Cottrell atmospheres) of dopant atoms form around defects after ion implantation and annealing. Furthermore, these atmospheres persist in surrounding dislocation loops even after considerable thermal treatment creating dopant fluctuations that may ultimately limit the scalability of semiconductor devices.

This is the first time that unambiguous quantitative 3D information regarding the precise location of individual dopant atoms relative to defects has been available said study co-author and Imago CEO Tom Kelly. The ability of the Imago LEAP 3000X Si laser assisted atom probe to make this measurement is the fruition of many years of instrumentation and applications development. We now have a powerful new way to probe the atomic positions of dopants in a semiconductor device. This is a critical tool for scientists seeking to answer Professor Feynmans challenge to manipulate matter at the atomic level and hence enable nanotechnology.

Previously, researchers have used secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM) to correlate indirectly the presence of dopant atoms with the evolution of defects, and detailed models have been proposed to account for these experimental correlations. However, the atom probe study published in Science reports, for the first time, the location of individual dopant atoms. Said Imago Senior Director of Applications and co-author David Larson, The Sept. 7 Science article is the most recent in a series of significant scientific advances reported by Imagos customers. Added Dr. Larson, In addition to producing breakthrough published scientific results, the Imago atom probe is also being applied to various industrial problems. These proprietary results are advancing scientific knowledge, enabling the development of new products, and improving time to market for our customers.


'/>"/>
Contact: Jason Schneir
jschneir@imago.com
608-274-6880 x239
Imago Scientific Instruments
Source:Eurekalert

Related biology technology :

1. Imago sells microscope to Iowa State
2. Imago upgrades atom-probe microscope
3. Imago earns more acclaim for microscope
4. Northwestern adds to its Imago microscope
5. Investors commit $3.4 million to Imago
6. Imago acquires synergistic British firm
7. Imago microscope leads to Northwestern research advance
8. Tech Digest: Imago; RedPrairie
9. UW-Madison helps Imago carry out its big vision for seeing small
10. Japanese institute installs Imago system
11. Imago provides atomic probe to Australian lab
Post Your Comments:
*Name:
*Comment:
*Email:
(Date:12/7/2016)... and Azusa, CA (PRWEB) , ... December 07, ... ... of distributed wastewater treatment and resource recovery solutions for industrial facilities, today announced ... , will be the first to use Cambrian’s novel water-energy purchase agreement (WEPA). ...
(Date:12/7/2016)... ... December 07, 2016 , ... ... access program for SmartBiome -- a novel metagenomic deep-sequencing research platform. SmartBiome ... and detection of hundreds of different genes. The selective early access program ...
(Date:12/6/2016)... , Dec. 6, 2016 /PRNewswire/ - SQI Diagnostics Inc. ("SQI" or the ... for the fourth quarter and fiscal year ended September 30, 2016. ... , , ... -based life sciences and diagnostics company that develops and commercializes proprietary ... Highlights Achieved revenues of $1.4 million more than ...
(Date:12/6/2016)... ... 06, 2016 , ... Discovering new clues to natural treatments that could allow ... in our brains. And searching for keys to our immune systems by studying parasite-resistant ... the 2017 Edith and Peter O’Donnell Awards by The Academy of ...
Breaking Biology Technology:
(Date:11/29/2016)... 2016 BioDirection, a privately held medical device ... objective detection of concussion and other traumatic brain injury ... a meeting with the U.S. Food and Drug Administration ... Package. During the meeting company representatives reviewed plans for ... to commencement of a planned pilot trial. ...
(Date:11/28/2016)... , Nov. 28, 2016 ... rate of 16.79%" The biometric system market is ... further in the near future. The biometric system market ... in 2022, at a CAGR of 16.79% between 2016 ... integration of biometric technology in smartphones, rising use of ...
(Date:11/22/2016)... 22, 2016   MedNet Solutions , an innovative ... of clinical research, is pleased to announce that the ... and Life Sciences Awards as "Most Outstanding in ... unprecedented year of recognition and growth for MedNet, which ... years. iMedNet ™ , MedNet,s ...
Breaking Biology News(10 mins):