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Global Micro-Electromechanical Systems (MEMs) Devices Industry
Date:5/19/2011

graphy 44

II. Bulk Micromachining 45

III. Surface Micromachining 45

Fusion Bonding 45

IV. High-Aspect-Ratio Micromachining 46

MEMS Thin Film Deposition Processes 46

I. Chemical-Reaction Based Processes 46

i. Chemical Vapor Deposition (CVD) 46

ii. Electrodeposition 47

iii. Epitaxy 47

iv. Thermal Oxidation 48

II. Physical-Reaction Based Processes 48

i. Physical Vapor Deposition (PVD) 48

ii. Casting 49

Micro-Fabrication of MEMS and Semiconductors - A Comparison 49

Semiconductor to MEMS Manufacturing - Shifting Viability 49

7. INDUSTRY ISSUES AND CHALLENGES 50

Barriers to Infrastructure 50

MEMS Packaging Issues 51

MEMS Packaging Goes Hybrid 51

MEMS Packaging Needs 52

MEMS Testing Issues 52

Stiction and MEMS Reliability 52

Access to Foundries 53

Design, Simulation and Modelling 53

Associated Costs 53

Standardization 54

Lack of Standards Hinders Growth 54

8. PRODUCT LAUNCHES 55

Sensonor Technologies Introduces Digital Absolute Pressure Sensor 55

Acuity Expands AC3030 Series Pressure Sensor Range 55

Colibrys Introduces MEMS Tilt Sensor 56

Colibrys Introduces MEMS Accelerometer 56

STMicroelectronics to Develop SENSIMED Triggerfish Wireless

MEMS Sensor 56

Wolfson Microelectronics to Introduce Digital MEMS Microphone

Range 57

Hewlett-Packard Introduces MEMS Sensor System 57

Kistler Instruments Introduces Type 8766A Triaxial Accelerometers 57

SensorDynamics Introduces New MEMS Gyroscope Range 58

SensorDynamics Introduces New 3D and 2D Gyroscopes 58

EMCORE Introduces New Range of EMP Fiber-optic Gyroscope Modules 58

Sensonor Technologies to Develop SAR500 59

Appareo Systems in Collaboration with Analog Devices Develops

ALERTS Vision 1000 59

Analog Devices Develops Two
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