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Cold atoms could replace hot gallium in focused ion beams
Date:11/13/2008

Scientists at the National Institute of Standards and Technology (NIST) have developed a radical new method of focusing a stream of ions into a point as small as one nanometer (one billionth of a meter).* Because of the versatility of their approachit can be used with a wide range of ions tailored to the task at handit is expected to have broad application in nanotechnology both for carving smaller features on semiconductors than now are possible and for nondestructive imaging of nanoscale structures with finer resolution than currently possible with electron microscopes.

Researchers and manufacturers routinely use intense, focused beams of ions to carve nanometer-sized features into a wide variety of targets. In principle, ion beams also could produce better images of nanoscale surface features than conventional electron microscopy. But the current technology for both applications is problematic. In the most widely used method, a metal-coated needle generates a narrowly focused beam of gallium ions. The high energies needed to focus gallium for milling tasks end up burying small amounts in the sample, contaminating the material. And because gallium ions are so heavy (comparatively speaking), if used to collect images they inadvertently damage the sample, blasting away some of its surface while it is being observed. Researchers have tried using other types of ions but were unable to produce the brightness or intensity necessary for the ion beam to cut into most materials.

The NIST team took a completely different approach to generating a focused ion beam that opens up the possibility for use of non-contaminating elements. Instead of starting with a sharp metal point, they generate a small "cloud" of atoms and then combine magnetic fields with laser light to trap and cool these atoms to extremely low temperatures. Another laser is used to ionize the atoms, and the charged particles are accelerated through a small hole to create a small but
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Contact: Mark Bello
mark.bello@nist.gov
301-975-3776
National Institute of Standards and Technology (NIST)
Source:Eurekalert  

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