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‘Key’ EUV milestone, DSA progress, more reported at SPIE Advanced Lithography
Date:3/5/2013

recent JM3 editorial, editor-in-chief Chris Mack (LithoGuru.com) noted the high quality of many proceedings papers, and encouraged submissions of letters and review papers for JM3 publication as well.

Next year’s event will return to the San Jose Marriott and San Jose Convention Center, with conferences and professional development courses 23-27 February and the exhibition 25-26 February.

About SPIE

SPIE is the international society for optics and photonics, a not-for-profit organization founded in 1955 to advance light-based technologies. The Society serves nearly 225,000 constituents from approximately 150 countries, offering conferences, continuing education, books, journals, and a digital library in support of interdisciplinary information exchange, professional networking, and patent precedent. SPIE provided over $3.2 million in support of education and outreach programs in 2012.

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