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‘Big Glass’ and Visions for the Future are on the Program for SPIE Photomask Technology
Date:6/19/2013

sk-related tasks of EUV will be covered.

Symposium co-chair Paul Ackmann (GLOBALFOUNDRIES Inc.) will lead the final day’s panel discussion on "Big bad glass: Will nine-inch glass return?" The panel will address questions such as whether changes in the wafer landscape require the move to larger glass, what the cost of not doing so would be and whether another technique would support the technology. Panelists will include:

  •      Donis Flagello, Nikon Research Corp. of America
  •     Janice Golda, Intel Corp.
  •     Brian Grenon, Grenon Consulting, Inc.
  •     Franklin Kalk, Toppan Photomasks, Inc.
  •     Harry Levinson, GLOBALFOUNDRIES Inc.
  •     Daniel Wack, KLA-Tencor Corp.

The exhibition will run Tuesday and Wednesday during the event and feature companies including Carl Zeiss, Gudeng, Ibss Group, Inko Industrial Corp., Micro Lithography, Mitsui Chemicals America, Nippon Control System Corp., Solid State Technology (PennWell Corp.), Pozzetta, RAVE LLC, Shin-Etsu Micro Si, Synopsys, XYALIS and Zeeko.

For the first time, meeting attendees will have free 90-day access to conference proceedings in the SPIE Digital Library beginning during the event, in addition to a full-conference proceedings on CD. Proceedings are published online as manuscripts are approved, with CD publication when all manuscripts are in.

About SPIE

SPIE is the international society for optics and photonics, a not-for-profit organization founded in 1955 to advance light-based technologies. The Society serves more than 23
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