Scientists at the Georgia Institute of Technology have developed a new technique for nanolithography that is extremely fast and capable of being used in a range of environments including air (outside a vacuum) and liquids. Researchers have demonstrated the technique, known as thermochemical nanolithography, as a proof of concept. The technique may allow industry to produce a variety of nanopatterned structures, including nanocircuits, at a speed and scale that could make their manufacture commercially viable. The research, which has potential applications for fields ranging from the electronics industry to nanofluidics to medicine, appeared earlier this year in the journal Nano Letters.
The technique is surprisingly simple. Using an atomic force microscope (AFM), researchers heat a silicon tip and run it over a thin polymer film. The heat from the tip induces a chemical reaction at the surface of the film. This reaction changes the films chemical reactivity and transforms it from a hydrophobic substance to a hydrophilic one that can stick to other molecules. The technique is extremely fast and can write at speeds faster than millimeters per second. Thats orders of magnitude faster than the widely used dip-pen nanolithography (DPN), which routinely clocks at a speed of 0.0001 millimeters per second.
Using the new technique, researchers were able to pattern with dimensions down to 12 nanometers in width in a variety of environments. Other techniques typically require the addition of other chemicals to be transferred to the surface or the presence of strong electric fields. TCNL doesnt have these requirements and can be used in humid environments outside a vacuum. By using an array of AFM tips developed by IBM, TCNL also has the potential to be massively scalable, allowing users to independently draw features with thousands of tips at a time rather than just one.
Thermochemical nanolithography is a rapid and versatile technique that pu
|Contact: David Terraso|
Georgia Institute of Technology